Lam Research product solutions for front-end wafer processing

Legacy Products

For applications that do not require the most advanced wafer processing capability, chip manufacturers can benefit from the proven performance of previous-generation (legacy) products to increase their production capacity at a reduced economic investment. Purchasing through an original equipment manufacturer (OEM) like Lam Research minimizes the risks of unexpected costs and unpredictable time to production that are typically associated with used systems purchases.

To meet semiconductor manufacturers’ needs for high-performance, maximum-predictability, and low-risk equipment, Lam's Reliant™ Systems Business provides refurbished and newly built legacy products. Offerings include:
Process Applications Offerings
Etch Dielectric, Silicon, Metal Refurbished, New Systems
PECVD SiOx, SiN, Low-k, AHM, TEOS Refurbished
HDP-CVD STI, ILD, IMD, Advanced Gapfill Refurbished
Tungsten CVD Contact, Via Fill Refurbished
Photoresist Strip FEOL, BEOL Refurbished
Wet Clean FEOL, BEOL, Packaging Refurbished, New Systems
CMP Tungsten Polish Refurbished

Refurbished systems are built and installed production-ready and on schedule by Lam-certified personnel to original specifications using OEM-certified parts to ensure the highest-quality products and reliable performance. This thorough approach to systems refurbishment includes the same testing protocols that are used on new products. Parts and labor, provided by a dedicated local support team, are included for 90 days. Software licenses are included, and system performance is guaranteed.