Increasing Production Capacity with Maximum Value

For applications that do not require the most advanced wafer processing capability, chip manufacturers can benefit from the proven performance of non-leading-edge (legacy) products to increase their production capacity at a reduced economic investment. Purchasing through an original equipment manufacturer (OEM) like Lam Research minimizes the risks of unexpected costs and unpredictable time to production that are typically associated with used systems purchases.

Lam's Reliant™ Systems Business meets semiconductor manufacturers’ needs for high-performance, maximum-predictability, and low-risk equipment by providing refurbished and newly built legacy products, as well as NUsed systems (new builds with some refurbished components). Systems are built and installed production-ready and on schedule by Lam-certified personnel to original specifications using OEM-certified parts to ensure the highest-quality products and reliable performance. This thorough approach to systems refurbishment includes the same testing protocols that are used on new products. Parts and labor, provided by a dedicated local support team, are included for 90 days. Software licenses are included, and system performance is guaranteed.

Lam’s Solutions:

Etch Dielectric, Silicon, Metal Refurbished, New Systems, NUsed
PECVD SiOx, SiN, Low-k, AHM, TEOS Refurbished, New Systems
HDP-CVD STI, ILD, IMD, Advanced Gapfill Refurbished, New Systems
Tungsten CVD Contact, Via Fill Refurbished, New Systems
Photoresist Strip FEOL, BEOL Refurbished
Wet Clean FEOL, BEOL, Packaging Refurbished, New Systems
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