Lam Research is dedicated to the success of our customers by being the world-class provider of innovative productivity solutions to the semiconductor industry. As a leading supplier of plasma etch, single-wafer clean, thin film deposition, and photoresist strip processing systems,
Lam Research is committed to delivering robust solutions through our product offerings and
expert customer support.

Lam’s leading etch products address a broad range of applications, from conductor etch
and dielectric etch to emerging micro-electromechanical systems and deep silicon
(MEMS & Deep Si) and three-dimensional integrated circuit (3D IC) applications.  Lam’s
single-wafer clean products include both wet and plasma-based technologies, allowing chipmakers to implement customized yield-enhancing solutions.  Our 2300^® series software applications are designed to maximize equipment capability.  To meet varying levels of customer needs, we also offer refurbished and newly-built etch and spin clean legacy products.

Our advanced deposition systems include plasma-enhanced chemical vapor deposition (PECVD), high-density plasma chemical vapor deposition (HDP-CVD), tungsten chemical vapor deposition (W-CVD), electrochemical deposition (ECD), and physical vapor deposition (PVD). We also offer photoresist strip products for bulk strip and high-dose implant strip applications, as well as ultraviolet thermal processing (UVTP) for post-treatment of deposited films. Refurbished equipment is also available.