Products Overview
Lam Research is dedicated to the success of our customers by being the world-class provider of innovative productivity solutions to the semiconductor industry. As the leading plasma etch supplier and a leading provider of single-wafer wet processing systems, we at Lam Research Plasma etch processes, one of the most critical steps of semiconductor device manufacturing, Lam’s leading etch products address a broad range of applications, from conductor etch and dielectric etch to emerging micro-electromechanical systems (MEMS) and three-dimensional integrated circuit (3-D IC) applications. Lam’s single-wafer clean products include both wet and plasma-based technologies, allowing chipmakers to implement customized yield-enhancing solutions. Our 2300® series software applications are designed to maximize equipment capability. To meet varying levels of customer needs, we also offer refurbished and newly-built legacy products. With this broad product portfolio and combined expertise, Lam Research is addressing some of the toughest semiconductor processing challenges. |
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