Semiconductor manufacturers are placing growing emphasis on increasing factory efficiency while reducing operating costs. At the same time, plasma etch and wet clean processes require
increasing levels of precision to manufacture leading-edge devices. As a result, manufacturing equipment has become more complex with each new technology generation. Given these trends,
process and hardware engineers have a growing need for sophisticated software tools to rapidly
analyze data, troubleshoot problems, and automate procedures to maximize equipment
capability.
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2300® Series Software Applications
Lam Research offers a suite of software applications designed to improve the engineer’s ability to develop, optimize, and monitor processes, as well as monitor and maintain Lam Research equipment. By using these software tools, customers can realize higher system availability, reduced system maintenance costs, greater engineering efficiencies, and improved process performance. Software applications and capabilities for Lam’s 2300 series products include:
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Data Management and Analysis – provides centralized data archiving and search capability with high-speed data analysis and comparison for process optimization and troubleshooting. Real-time fault detection, intervention, and analysis capabilities provide comprehensive process monitoring to maximize “good wafers out.” |
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Remote Control and Diagnostics – allows remote control, operation, and analysis of equipment. The software simplifies recipe and configuration management to optimize system efficiency with minimal expenditure of customer engineering resources. |
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Tool Automation – provides a combination of automatic maintenance procedures, system diagnostics, and comprehensive system performance reports. The software minimizes tool downtime and maximizes good wafers out by reducing process excursions. |
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