{"id":13178,"date":"2018-01-11T15:51:40","date_gmt":"2018-01-11T23:51:40","guid":{"rendered":"https:\/\/lamrstage.wpengine.com\/product\/reliant-strip-clean-products\/"},"modified":"2023-09-18T11:05:08","modified_gmt":"2023-09-18T18:05:08","slug":"reliant-strip-clean-products","status":"publish","type":"product","link":"https:\/\/www.lamresearch.com\/de\/product\/reliant-strip-clean-products\/","title":{"rendered":"Reliant-Reinigungsprodukte"},"content":{"rendered":"<p>Zwischen den einzelnen Fertigungsschritten ist ein breites Spektrum an Wafer-Reinigungstechniken erforderlich, um unerw\u00fcnschtes Material zu entfernen, das zu Defekten f\u00fchren k\u00f6nnte, und um die Wafer-Oberfl\u00e4che f\u00fcr die Weiterverarbeitung vorzubereiten. Die Nassbearbeitung wird auch f\u00fcr Anwendungen wie die Entfernung von Fotolack und das Ausd\u00fcnnen von Silizium verwendet.<\/p>\n<p>Die Reliant<sup>\u00ae<\/sup> Spin-Nassreinigungsprodukte von Lam bieten eine umfassende Palette an bew\u00e4hrten, hochproduktiven L\u00f6sungen f\u00fcr die Front-End-of-Line- (FEOL), Back-End-of-Line- (BEOL) und R\u00fcckseiten-\/Fasenreinigung.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Unsere Reliant-Reinigungsprodukte unterst\u00fctzen Roadmaps f\u00fcr Spezialtechnologien und verl\u00e4ngern die produktive Lebensdauer von Fabs. <\/p>\n","protected":false},"author":31,"featured_media":10786,"parent":0,"menu_order":158,"template":"","meta":{"_acf_changed":false,"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":""},"process":[399],"solution":[634,321,325,330,333,349,345,352],"technology":[252,557],"class_list":["post-13178","product","type-product","status-publish","has-post-thumbnail","hentry","process-strip-clean-de","solution-advanced-packaging-de","solution-analog-mixed-signal-de","solution-discrete-power-devices-de","solution-interconnect-de","solution-optoelectronics-photonics-de","solution-sensors-transducers-de","solution-patterning-de","solution-transistor-de","technology-spin-wet-clean-de","technology-reliant-systems-de"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Reliant-Reinigungsprodukte - Lam Research<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/\" \/>\n<meta property=\"og:locale\" content=\"de_DE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Reliant-Reinigungsprodukte - Lam Research\" \/>\n<meta property=\"og:description\" content=\"Unsere Reliant-Reinigungsprodukte unterst\u00fctzen Roadmaps f\u00fcr Spezialtechnologien und verl\u00e4ngern die produktive Lebensdauer von Fabs.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/\" \/>\n<meta property=\"og:site_name\" content=\"Lam Research\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/LamResearchCorporation\" \/>\n<meta property=\"article:modified_time\" content=\"2023-09-18T18:05:08+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2018\/01\/Reliant_Clean_Products_1920x600.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1920\" \/>\n\t<meta property=\"og:image:height\" content=\"600\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:site\" content=\"@lamresearch\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/reliant-strip-clean-products\\\/\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/reliant-strip-clean-products\\\/\",\"name\":\"Reliant-Reinigungsprodukte - Lam Research\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/reliant-strip-clean-products\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/reliant-strip-clean-products\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2018\\\/01\\\/Reliant_Clean_Products_1920x600.jpg\",\"datePublished\":\"2018-01-11T23:51:40+00:00\",\"dateModified\":\"2023-09-18T18:05:08+00:00\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/reliant-strip-clean-products\\\/#breadcrumb\"},\"inLanguage\":\"de-DE\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/reliant-strip-clean-products\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"de-DE\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/reliant-strip-clean-products\\\/#primaryimage\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2018\\\/01\\\/Reliant_Clean_Products_1920x600.jpg\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2018\\\/01\\\/Reliant_Clean_Products_1920x600.jpg\",\"width\":1920,\"height\":600},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/reliant-strip-clean-products\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Products\",\"item\":\"https:\\\/\\\/www.lamresearch.com\\\/ko\\\/lam_products\\\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Reliant-Reinigungsprodukte\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"name\":\"Lam Research\",\"description\":\"Engineering At The Atomic Scale\",\"publisher\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/www.lamresearch.com\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"de-DE\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\",\"name\":\"Lam Research\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"de-DE\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"width\":188,\"height\":30,\"caption\":\"Lam Research\"},\"image\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\"},\"sameAs\":[\"https:\\\/\\\/www.facebook.com\\\/LamResearchCorporation\",\"https:\\\/\\\/x.com\\\/lamresearch\",\"https:\\\/\\\/www.instagram.com\\\/lam_research\\\/\",\"https:\\\/\\\/www.linkedin.com\\\/company\\\/lam-research\",\"https:\\\/\\\/www.youtube.com\\\/user\\\/LamResearchCorp\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Reliant-Reinigungsprodukte - Lam Research","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/","og_locale":"de_DE","og_type":"article","og_title":"Reliant-Reinigungsprodukte - Lam Research","og_description":"Unsere Reliant-Reinigungsprodukte unterst\u00fctzen Roadmaps f\u00fcr Spezialtechnologien und verl\u00e4ngern die produktive Lebensdauer von Fabs.","og_url":"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/","og_site_name":"Lam Research","article_publisher":"https:\/\/www.facebook.com\/LamResearchCorporation","article_modified_time":"2023-09-18T18:05:08+00:00","og_image":[{"width":1920,"height":600,"url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2018\/01\/Reliant_Clean_Products_1920x600.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_site":"@lamresearch","schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/","url":"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/","name":"Reliant-Reinigungsprodukte - Lam Research","isPartOf":{"@id":"https:\/\/www.lamresearch.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/#primaryimage"},"image":{"@id":"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/#primaryimage"},"thumbnailUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2018\/01\/Reliant_Clean_Products_1920x600.jpg","datePublished":"2018-01-11T23:51:40+00:00","dateModified":"2023-09-18T18:05:08+00:00","breadcrumb":{"@id":"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/#breadcrumb"},"inLanguage":"de-DE","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/"]}]},{"@type":"ImageObject","inLanguage":"de-DE","@id":"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/#primaryimage","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2018\/01\/Reliant_Clean_Products_1920x600.jpg","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2018\/01\/Reliant_Clean_Products_1920x600.jpg","width":1920,"height":600},{"@type":"BreadcrumbList","@id":"https:\/\/www.lamresearch.com\/product\/reliant-strip-clean-products\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.lamresearch.com\/de\/"},{"@type":"ListItem","position":2,"name":"Products","item":"https:\/\/www.lamresearch.com\/ko\/lam_products\/"},{"@type":"ListItem","position":3,"name":"Reliant-Reinigungsprodukte"}]},{"@type":"WebSite","@id":"https:\/\/www.lamresearch.com\/#website","url":"https:\/\/www.lamresearch.com\/","name":"Lam Research","description":"Engineering At The Atomic Scale","publisher":{"@id":"https:\/\/www.lamresearch.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.lamresearch.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"de-DE"},{"@type":"Organization","@id":"https:\/\/www.lamresearch.com\/#organization","name":"Lam Research","url":"https:\/\/www.lamresearch.com\/","logo":{"@type":"ImageObject","inLanguage":"de-DE","@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","width":188,"height":30,"caption":"Lam Research"},"image":{"@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.facebook.com\/LamResearchCorporation","https:\/\/x.com\/lamresearch","https:\/\/www.instagram.com\/lam_research\/","https:\/\/www.linkedin.com\/company\/lam-research","https:\/\/www.youtube.com\/user\/LamResearchCorp"]}]}},"process_terms":[{"term_id":399,"name":"Strippen und Reinigen","slug":"strip-clean-de","taxonomy":"process","parent":0,"order":0}],"solution_terms":[{"term_id":632,"name":"Advanced Packaging","slug":"advanced-packaging","taxonomy":"solution","parent":0,"order":0},{"term_id":321,"name":"Analoge und gemischte Signale","slug":"analog-mixed-signal-de","taxonomy":"solution","parent":0,"order":0},{"term_id":325,"name":"Diskrete & Leistungsbauelemente","slug":"discrete-power-devices-de","taxonomy":"solution","parent":0,"order":0},{"term_id":330,"name":"Interconnect","slug":"interconnect-de","taxonomy":"solution","parent":0,"order":0},{"term_id":333,"name":"Optoelektronik und Photonik","slug":"optoelectronics-photonics-de","taxonomy":"solution","parent":0,"order":0},{"term_id":349,"name":"Sensoren und Wandler","slug":"sensors-transducers-de","taxonomy":"solution","parent":0,"order":0},{"term_id":345,"name":"Strukturierung","slug":"patterning-de","taxonomy":"solution","parent":0,"order":0},{"term_id":352,"name":"Transistor","slug":"transistor-de","taxonomy":"solution","parent":0,"order":0}],"technology_terms":[{"term_id":252,"name":"Nassreinigung\/Strippen\/\u00c4tzen","slug":"spin-wet-clean-de","taxonomy":"technology","parent":0,"order":0},{"term_id":557,"name":"Reliant Systems","slug":"reliant-systems-de","taxonomy":"technology","parent":0,"order":0}],"industry_challenges":"<p>Das Entstehen verschiedener M\u00e4rkte, die unter dem Begriff \u201eMore than Moore\u201c zusammengefasst werden, macht zus\u00e4tzliche Reinigungsschritte erforderlich, um die Waferoberfl\u00e4che f\u00fcr die Weiterverarbeitung zu behandeln. Diese Segmente \u2013 zu denen mikroelektromechanische Systeme (MEMS) und Sensoren, Produkte f\u00fcr das Internet der Dinge (IoT) und Leistungsbauelemente geh\u00f6ren \u2013 erfordern effiziente Reinigungsschritte, die die Entfernung einer Vielzahl von Materialien erfordern. Bei Spitzentechnologie-Chips m\u00fcssen die Reinigungsprozesse gr\u00fcndlich, aber dennoch schonend sein, um die empfindlichen Strukturen nicht zu besch\u00e4digen. Hier ist die Kosteneffizienz besonders wichtig. Dar\u00fcber hinaus werden Produktivit\u00e4tsl\u00f6sungen ben\u00f6tigt, die den Durchsatz sowie die Zuverl\u00e4ssigkeit und Verf\u00fcgbarkeit der Anlagen verbessern.<\/p>\n","key_benefits":["Prozessflexibilit\u00e4t f\u00fcr eine breite Palette von Materialien","Handhabung ultrad\u00fcnner Substrate f\u00fcr 150-mm- bis 300-mm-Wafer","Ausgezeichnete Prozessgleichm\u00e4\u00dfigkeit \u00fcber den gesamten Wafer, von Wafer zu Wafer und von Charge zu Charge","Produktivit\u00e4tssteigerung f\u00fcr CMOS-Bildsensoren und das \u00c4tzen von Silizium f\u00fcr Leistungsbauelemente "],"product_offerings":["Da Vinci<sup>\u00ae<\/sup>-Familie","SP Series-Familie"],"key_applications":["Nassreinigung","Nass\u00e4tzung","Nasses Fotolack-Strippen","Ausd\u00fcnnen von Siliziumwafern"],"featured_media_src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2018\/01\/Reliant_Clean_Products_1920x600.jpg","drawer_background_image":{"id":10786,"src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2018\/01\/Reliant_Clean_Products_1920x600.jpg"},"_links":{"self":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product\/13178","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/types\/product"}],"author":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/users\/31"}],"version-history":[{"count":0,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product\/13178\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/media\/10786"}],"wp:attachment":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/media?parent=13178"}],"wp:term":[{"taxonomy":"process","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/process?post=13178"},{"taxonomy":"solution","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/solution?post=13178"},{"taxonomy":"technology","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/technology?post=13178"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}