{"id":13184,"date":"2018-01-11T15:22:33","date_gmt":"2018-01-11T23:22:33","guid":{"rendered":"https:\/\/lamrstage.wpengine.com\/product\/reliant-etch-products\/"},"modified":"2024-06-05T07:49:13","modified_gmt":"2024-06-05T14:49:13","slug":"reliant-etch-products","status":"publish","type":"product","link":"https:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/","title":{"rendered":"Reliant-\u00c4tzprodukte"},"content":{"rendered":"<p>Die \u00c4tztechnik wird in allen Fertigungsprozessen von Halbleiterbauelementen eingesetzt, um die Funktionsmerkmale herauszuarbeiten, die die Transistoren, Kontakte und Metallverdrahtungsstrukturen eines Halbleiterbauelements bilden. Mehrere aufstrebende M\u00e4rkte, darunter mikroelektromechanische Systeme (MEMS) und Leistungschips, verwenden mehrere Bauelementtypen, einige mit gr\u00f6\u00dferen und\/oder weniger komplexen Funktionsmerkmalen und neuen Materialien als die der derzeitigen Technologieknoten. Daher stellen sie zus\u00e4tzliche Anforderungen an die Fertigung und erfordern neue Strategien f\u00fcr das Produktionsmanagement.<\/p>\n<p>Die Reliant<sup>\u00ae<\/sup>-\u00c4tzprodukte von Lam unterst\u00fctzen Roadmaps f\u00fcr Spezialtechnologien und verl\u00e4ngern die produktive Lebensdauer von Fabs.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Unsere Reliant-\u00c4tzprodukte unterst\u00fctzen Roadmaps f\u00fcr Spezialtechnologien und verl\u00e4ngern die produktive Lebensdauer von Fabs. <\/p>\n","protected":false},"author":31,"featured_media":10736,"parent":0,"menu_order":191,"template":"","meta":{"_acf_changed":false,"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":""},"process":[377],"solution":[634,321,325,315,330,333,349,352],"technology":[259,557,292],"class_list":["post-13184","product","type-product","status-publish","has-post-thumbnail","hentry","process-etch-de","solution-advanced-packaging-de","solution-analog-mixed-signal-de","solution-discrete-power-devices-de","solution-advanced-memory-de","solution-interconnect-de","solution-optoelectronics-photonics-de","solution-sensors-transducers-de","solution-transistor-de","technology-reactive-ion-etch-de","technology-reliant-systems-de","technology-drie-de"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Reliant-\u00c4tzprodukte - Lam Research<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/\" \/>\n<meta property=\"og:locale\" content=\"de_DE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Reliant-\u00c4tzprodukte - Lam Research\" \/>\n<meta property=\"og:description\" content=\"Unsere Reliant-\u00c4tzprodukte unterst\u00fctzen Roadmaps f\u00fcr Spezialtechnologien und verl\u00e4ngern die produktive Lebensdauer von Fabs.\" \/>\n<meta property=\"og:url\" content=\"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/\" \/>\n<meta property=\"og:site_name\" content=\"Lam Research\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/LamResearchCorporation\" \/>\n<meta property=\"article:modified_time\" content=\"2024-06-05T14:49:13+00:00\" \/>\n<meta property=\"og:image\" content=\"http:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/Alliance_Products_1920x600.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1920\" \/>\n\t<meta property=\"og:image:height\" content=\"600\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:site\" content=\"@lamresearch\" \/>\n<meta name=\"twitter:label1\" content=\"Gesch\u00e4tzte Lesezeit\" \/>\n\t<meta name=\"twitter:data1\" content=\"1 Minute\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/reliant-etch-products\\\/\",\"url\":\"http:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/reliant-etch-products\\\/\",\"name\":\"Reliant-\u00c4tzprodukte - Lam Research\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/reliant-etch-products\\\/#primaryimage\"},\"image\":{\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/reliant-etch-products\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2017\\\/09\\\/Alliance_Products_1920x600.jpg\",\"datePublished\":\"2018-01-11T23:22:33+00:00\",\"dateModified\":\"2024-06-05T14:49:13+00:00\",\"breadcrumb\":{\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/reliant-etch-products\\\/#breadcrumb\"},\"inLanguage\":\"de-DE\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"http:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/reliant-etch-products\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"de-DE\",\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/reliant-etch-products\\\/#primaryimage\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2017\\\/09\\\/Alliance_Products_1920x600.jpg\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2017\\\/09\\\/Alliance_Products_1920x600.jpg\",\"width\":1920,\"height\":600},{\"@type\":\"BreadcrumbList\",\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/reliant-etch-products\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Products\",\"item\":\"https:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/lam_products\\\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"Reliant-\u00c4tzprodukte\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"name\":\"Lam Research\",\"description\":\"Engineering At The Atomic Scale\",\"publisher\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/www.lamresearch.com\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"de-DE\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\",\"name\":\"Lam Research\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"de-DE\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"width\":188,\"height\":30,\"caption\":\"Lam Research\"},\"image\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\"},\"sameAs\":[\"https:\\\/\\\/www.facebook.com\\\/LamResearchCorporation\",\"https:\\\/\\\/x.com\\\/lamresearch\",\"https:\\\/\\\/www.instagram.com\\\/lam_research\\\/\",\"http:\\\/\\\/www.linkedin.com\\\/company\\\/lam-research\",\"http:\\\/\\\/www.youtube.com\\\/user\\\/LamResearchCorp\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"Reliant-\u00c4tzprodukte - Lam Research","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/","og_locale":"de_DE","og_type":"article","og_title":"Reliant-\u00c4tzprodukte - Lam Research","og_description":"Unsere Reliant-\u00c4tzprodukte unterst\u00fctzen Roadmaps f\u00fcr Spezialtechnologien und verl\u00e4ngern die produktive Lebensdauer von Fabs.","og_url":"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/","og_site_name":"Lam Research","article_publisher":"https:\/\/www.facebook.com\/LamResearchCorporation","article_modified_time":"2024-06-05T14:49:13+00:00","og_image":[{"width":1920,"height":600,"url":"http:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/Alliance_Products_1920x600.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_site":"@lamresearch","twitter_misc":{"Gesch\u00e4tzte Lesezeit":"1 Minute"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/","url":"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/","name":"Reliant-\u00c4tzprodukte - Lam Research","isPartOf":{"@id":"https:\/\/www.lamresearch.com\/#website"},"primaryImageOfPage":{"@id":"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/#primaryimage"},"image":{"@id":"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/#primaryimage"},"thumbnailUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/Alliance_Products_1920x600.jpg","datePublished":"2018-01-11T23:22:33+00:00","dateModified":"2024-06-05T14:49:13+00:00","breadcrumb":{"@id":"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/#breadcrumb"},"inLanguage":"de-DE","potentialAction":[{"@type":"ReadAction","target":["http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/"]}]},{"@type":"ImageObject","inLanguage":"de-DE","@id":"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/#primaryimage","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/Alliance_Products_1920x600.jpg","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/Alliance_Products_1920x600.jpg","width":1920,"height":600},{"@type":"BreadcrumbList","@id":"http:\/\/www.lamresearch.com\/de\/product\/reliant-etch-products\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.lamresearch.com\/de\/"},{"@type":"ListItem","position":2,"name":"Products","item":"https:\/\/www.lamresearch.com\/zh-hant\/lam_products\/"},{"@type":"ListItem","position":3,"name":"Reliant-\u00c4tzprodukte"}]},{"@type":"WebSite","@id":"https:\/\/www.lamresearch.com\/#website","url":"https:\/\/www.lamresearch.com\/","name":"Lam Research","description":"Engineering At The Atomic Scale","publisher":{"@id":"https:\/\/www.lamresearch.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.lamresearch.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"de-DE"},{"@type":"Organization","@id":"https:\/\/www.lamresearch.com\/#organization","name":"Lam Research","url":"https:\/\/www.lamresearch.com\/","logo":{"@type":"ImageObject","inLanguage":"de-DE","@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","width":188,"height":30,"caption":"Lam Research"},"image":{"@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.facebook.com\/LamResearchCorporation","https:\/\/x.com\/lamresearch","https:\/\/www.instagram.com\/lam_research\/","http:\/\/www.linkedin.com\/company\/lam-research","http:\/\/www.youtube.com\/user\/LamResearchCorp"]}]}},"process_terms":[{"term_id":377,"name":"\u00c4tzen","slug":"etch-de","taxonomy":"process","parent":0,"order":0}],"solution_terms":[{"term_id":634,"name":"Advanced Packaging","slug":"advanced-packaging-de","taxonomy":"solution","parent":0,"order":0},{"term_id":321,"name":"Analoge und gemischte Signale","slug":"analog-mixed-signal-de","taxonomy":"solution","parent":0,"order":0},{"term_id":325,"name":"Diskrete & Leistungsbauelemente","slug":"discrete-power-devices-de","taxonomy":"solution","parent":0,"order":0},{"term_id":315,"name":"Erweiterter Speicher","slug":"advanced-memory-de","taxonomy":"solution","parent":0,"order":0},{"term_id":330,"name":"Interconnect","slug":"interconnect-de","taxonomy":"solution","parent":0,"order":0},{"term_id":333,"name":"Optoelektronik und Photonik","slug":"optoelectronics-photonics-de","taxonomy":"solution","parent":0,"order":0},{"term_id":349,"name":"Sensoren und Wandler","slug":"sensors-transducers-de","taxonomy":"solution","parent":0,"order":0},{"term_id":352,"name":"Transistor","slug":"transistor-de","taxonomy":"solution","parent":0,"order":0}],"technology_terms":[{"term_id":259,"name":"Reaktive Ionen\u00e4tzung (RIE)","slug":"reactive-ion-etch-de","taxonomy":"technology","parent":0,"order":0},{"term_id":557,"name":"Reliant Systems","slug":"reliant-systems-de","taxonomy":"technology","parent":0,"order":0},{"term_id":292,"name":"Tiefe reaktive Ionen\u00e4tzung (DRIE)","slug":"drie-de","taxonomy":"technology","parent":0,"order":0}],"industry_challenges":"<p>Die \u201eMore than Moore\u201c-M\u00e4rkte \u2013 darunter MEMS, Leistungsbauelemente und das Internet der Dinge (IoT) \u2013 treiben den Bedarf an kosteng\u00fcnstigen Fertigungsl\u00f6sungen mit der F\u00e4higkeit, neue Anforderungen an den \u00c4tzprozess zu erf\u00fcllen, voran. Die Erf\u00fcllung dieser Anforderungen ist nach wie vor eine Herausforderung, da die gro\u00dfe Vielfalt der verwendeten Ger\u00e4tetypen und neuen Materialien vielf\u00e4ltige Anforderungen an das \u00c4tzen stellen. Bei Chips mit gro\u00dfen Funktionsmerkmalen besteht die prim\u00e4re Herausforderung darin, einen hohen Durchsatz zu erreichen, um die Produktivit\u00e4t aufrechtzuerhalten, w\u00e4hrend Designs mit Strukturen mit hohem Aspektverh\u00e4ltnis (HAR) eine gute Prozesskontrolle erfordern.<\/p>\n","key_benefits":["Hervorragende Gleichm\u00e4\u00dfigkeit und Wiederholbarkeit durch symmetrisches Kammerdesign, branchenf\u00fchrende elektrostatische Spannfuttertechnologie und unabh\u00e4ngige Funktionsmerkmale zur Prozessoptimierung","Hohe Produktivit\u00e4t bei geringer Fehleranf\u00e4lligkeit durch mehrstufiges In-situ-\u00c4tzen und kontinuierliche Plasmaprozesse","Erweiterte Steuerung f\u00fcr Anwendungen mit h\u00f6herem Aspektverh\u00e4ltnis","Risikoarme, kosteng\u00fcnstige \u00c4tzl\u00f6sungen f\u00fcr Wafergr\u00f6\u00dfen von 150\u00a0mm bis 300\u00a0mm"],"product_offerings":["Kiyo<sup>\u00ae<\/sup>-Familie (bis einschlie\u00dflich Kiyo45\u2122)","Flex<sup>\u00ae<\/sup>-Familie (bis einschlie\u00dflich Flex45\u2122)","DSiE\u2122-Familie","Syndion<sup>\u00ae<\/sup>-Familie ","TCP<sup>\u00ae<\/sup> 9400-Familie","TCP<sup>\u00ae<\/sup> 9600-Familie "],"key_applications":["\u00c4tzen von Leitern","Dielektrisches \u00c4tzen","Metall-\u00c4tzen","\u00c4tzen von Spezialschichten (Blei-Zirkonat-Titanat [PZT], GaN, AIGaN, SiC usw.)","Tiefes Silizium-\u00c4tzen f\u00fcr MEMS, Leistungsbauelemente und TSV-\u00c4tzanwendungen"],"featured_media_src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/Alliance_Products_1920x600.jpg","drawer_background_image":{"id":10736,"src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/Alliance_Products_1920x600.jpg"},"_links":{"self":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product\/13184","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/types\/product"}],"author":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/users\/31"}],"version-history":[{"count":0,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product\/13184\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/media\/10736"}],"wp:attachment":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/media?parent=13184"}],"wp:term":[{"taxonomy":"process","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/process?post=13184"},{"taxonomy":"solution","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/solution?post=13184"},{"taxonomy":"technology","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/technology?post=13184"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}