{"id":15282,"date":"2021-01-27T12:56:08","date_gmt":"2021-01-27T20:56:08","guid":{"rendered":"https:\/\/lamrstage.wpengine.com\/?post_type=product&#038;p=15282"},"modified":"2023-09-06T15:44:39","modified_gmt":"2023-09-06T22:44:39","slug":"vantex","status":"publish","type":"product","link":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/","title":{"rendered":"VANTEX PRODUKT FAMILIE"},"content":{"rendered":"<p>Dielektrische \u00c4tzprozesse entfernen nicht leitende Materialien w\u00e4hrend der Herstellung von Halbleiterbauelementen. Moderne und leistungsf\u00e4hige Speicherbauteile zeichnen sich durch besonders herausfordernde Strukturen aus, wie beispielsweise extrem tiefe Kontaktl\u00f6cher oder Gr\u00e4ben, die nur \u00e4u\u00dferst geringe Fertigungstoleranzen erlauben. <\/p>\n<p>Lam\u2019s dielektrische \u00c4tzsysteme bieten eine unerreichte \u00c4tzleistung und Produktivit\u00e4t und unterst\u00fctzen die Herstellung besonders komplexer, kleiner und enger Strukturen. Vantex<sup>\u2122<\/sup> bietet hoch entwickelte RF-Technologie, kontrollierte Gleichm\u00e4\u00dfigkeiten und Lam\u2019s bew\u00e4hrte Equipment Intelligence<sup>\u00ae<\/sup> und unterst\u00fctzt damit die Anforderungen modernster Fertigungsverfahren f\u00fcr Speicherchips.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Vantex wurde speziell f\u00fcr die Sense.i Plattform konzipiert und verbindet maximale \u00c4tztiefen und hohe Aspektverh\u00e4ltnisse mit technologischer Innovation und Equipment Intelligence.<\/p>\n","protected":false},"author":29,"featured_media":15248,"parent":0,"menu_order":13,"template":"","meta":{"_acf_changed":false,"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":""},"process":[377],"solution":[315],"technology":[787,259],"class_list":["post-15282","product","type-product","status-publish","has-post-thumbnail","hentry","process-etch-de","solution-advanced-memory-de","technology-kryogenes-atzen","technology-reactive-ion-etch-de"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>VANTEX PRODUKT FAMILIE - Lam Research<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.lamresearch.com\/de\/product\/vantex\/\" \/>\n<meta property=\"og:locale\" content=\"de_DE\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"VANTEX PRODUKT FAMILIE - Lam Research\" \/>\n<meta property=\"og:description\" content=\"Vantex wurde speziell f\u00fcr die Sense.i Plattform konzipiert und verbindet maximale \u00c4tztiefen und hohe Aspektverh\u00e4ltnisse mit technologischer Innovation und Equipment Intelligence.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.lamresearch.com\/de\/product\/vantex\/\" \/>\n<meta property=\"og:site_name\" content=\"Lam Research\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/LamResearchCorporation\" \/>\n<meta property=\"article:modified_time\" content=\"2023-09-06T22:44:39+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"2560\" \/>\n\t<meta property=\"og:image:height\" content=\"1440\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:site\" content=\"@lamresearch\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/vantex\\\/\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/vantex\\\/\",\"name\":\"VANTEX PRODUKT FAMILIE - Lam Research\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/vantex\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/vantex\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/01\\\/Vantex-internal-chamber-croppedv1.jpg\",\"datePublished\":\"2021-01-27T20:56:08+00:00\",\"dateModified\":\"2023-09-06T22:44:39+00:00\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/vantex\\\/#breadcrumb\"},\"inLanguage\":\"de-DE\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/vantex\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"de-DE\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/vantex\\\/#primaryimage\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/01\\\/Vantex-internal-chamber-croppedv1.jpg\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/01\\\/Vantex-internal-chamber-croppedv1.jpg\",\"width\":2560,\"height\":1440},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/product\\\/vantex\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/www.lamresearch.com\\\/de\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Products\",\"item\":\"https:\\\/\\\/www.lamresearch.com\\\/lam_products\\\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"VANTEX PRODUKT FAMILIE\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"name\":\"Lam Research\",\"description\":\"Engineering At The Atomic Scale\",\"publisher\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/www.lamresearch.com\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"de-DE\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\",\"name\":\"Lam Research\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"de-DE\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"width\":188,\"height\":30,\"caption\":\"Lam Research\"},\"image\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\"},\"sameAs\":[\"https:\\\/\\\/www.facebook.com\\\/LamResearchCorporation\",\"https:\\\/\\\/x.com\\\/lamresearch\",\"https:\\\/\\\/www.instagram.com\\\/lam_research\\\/\",\"http:\\\/\\\/www.linkedin.com\\\/company\\\/lam-research\",\"http:\\\/\\\/www.youtube.com\\\/user\\\/LamResearchCorp\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"VANTEX PRODUKT FAMILIE - Lam Research","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/","og_locale":"de_DE","og_type":"article","og_title":"VANTEX PRODUKT FAMILIE - Lam Research","og_description":"Vantex wurde speziell f\u00fcr die Sense.i Plattform konzipiert und verbindet maximale \u00c4tztiefen und hohe Aspektverh\u00e4ltnisse mit technologischer Innovation und Equipment Intelligence.","og_url":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/","og_site_name":"Lam Research","article_publisher":"https:\/\/www.facebook.com\/LamResearchCorporation","article_modified_time":"2023-09-06T22:44:39+00:00","og_image":[{"width":2560,"height":1440,"url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_site":"@lamresearch","schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/","url":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/","name":"VANTEX PRODUKT FAMILIE - Lam Research","isPartOf":{"@id":"https:\/\/www.lamresearch.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/#primaryimage"},"image":{"@id":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/#primaryimage"},"thumbnailUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","datePublished":"2021-01-27T20:56:08+00:00","dateModified":"2023-09-06T22:44:39+00:00","breadcrumb":{"@id":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/#breadcrumb"},"inLanguage":"de-DE","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.lamresearch.com\/de\/product\/vantex\/"]}]},{"@type":"ImageObject","inLanguage":"de-DE","@id":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/#primaryimage","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","width":2560,"height":1440},{"@type":"BreadcrumbList","@id":"https:\/\/www.lamresearch.com\/de\/product\/vantex\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.lamresearch.com\/de\/"},{"@type":"ListItem","position":2,"name":"Products","item":"https:\/\/www.lamresearch.com\/lam_products\/"},{"@type":"ListItem","position":3,"name":"VANTEX PRODUKT FAMILIE"}]},{"@type":"WebSite","@id":"https:\/\/www.lamresearch.com\/#website","url":"https:\/\/www.lamresearch.com\/","name":"Lam Research","description":"Engineering At The Atomic Scale","publisher":{"@id":"https:\/\/www.lamresearch.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.lamresearch.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"de-DE"},{"@type":"Organization","@id":"https:\/\/www.lamresearch.com\/#organization","name":"Lam Research","url":"https:\/\/www.lamresearch.com\/","logo":{"@type":"ImageObject","inLanguage":"de-DE","@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","width":188,"height":30,"caption":"Lam Research"},"image":{"@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.facebook.com\/LamResearchCorporation","https:\/\/x.com\/lamresearch","https:\/\/www.instagram.com\/lam_research\/","http:\/\/www.linkedin.com\/company\/lam-research","http:\/\/www.youtube.com\/user\/LamResearchCorp"]}]}},"process_terms":[{"term_id":377,"name":"\u00c4tzen","slug":"etch-de","taxonomy":"process","parent":0,"order":0}],"solution_terms":[{"term_id":315,"name":"Erweiterter Speicher","slug":"advanced-memory-de","taxonomy":"solution","parent":0,"order":0}],"technology_terms":[{"term_id":787,"name":"Kryogenes \u00c4tzen","slug":"kryogenes-atzen","taxonomy":"technology","parent":0,"order":0},{"term_id":259,"name":"Reaktive Ionen\u00e4tzung (RIE)","slug":"reactive-ion-etch-de","taxonomy":"technology","parent":0,"order":0}],"industry_challenges":"<p>Die Skalierung der Speicherkosten pro Bit stellt Halbleiterhersteller vor eine Reihe von Herausforderungen im Zusammenhang mit immer tieferen Strukturen, der gleichzeitigen Entfernung mehrerer Strukturen und der Implementierung komplexer neuer Verfahren. Die vertikale Skalierung erfordert das \u00c4tzen immer tieferer und engerer Strukturen bei gleichbleibenden kritischen Dimensionen der Strukturen, um die laterale Bauteildichte zu erhalten. Die vertikale Ausrichtung der \u00c4tzung erscheint zunehmend kritisch, da bereits kleinste Ionenwinkel-Abweichungen gro\u00dfe Auswirkungen auf die Funktionalit\u00e4t der Bauteile und eine Verringerung der Fertigungsausbeuten zur Folge haben k\u00f6nnen. Die Kombination mehrerer \u00c4tzschritte aus Gr\u00fcnden der Kostenreduktion setzt voraus, dass Strukturen mit unterschiedlichen kritischen Dimensionen und Formen gleichzeitig prozessiert werden k\u00f6nnen. Die Integeration neuester Fertigungsprozesse und der damit verbundene Abtrag multipler Materialschichten erfordert eine laufend verbesserte Steuerung und Kontrolle der Schichtselektivit\u00e4t.<\/p>\n","key_benefits":["\u00c4tzprozesse mit h\u00f6chsten Aspektraten, kleinsten kritischen Dimensionen und h\u00f6chster Selektivit\u00e4t ","Maximale Produktivit\u00e4t durch h\u00f6chste \u00c4tzraten und optimierte Prozesssteuerung","H\u00f6chste Wafer-to-Wafer-Gleichm\u00e4\u00dfigkeit und Prozesswiederholbarkeit durch modernste Equipment Intelligence"],"product_offerings":["Vantex<sup>\u2122<\/sup>"],"key_applications":["3D_NAND, tiefe, hochaspektierte Kontaktl\u00f6cher, Gr\u00e4ben und Kontakte","Kondensatorzellen"],"featured_media_src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","drawer_background_image":{"id":15248,"src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg"},"_links":{"self":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product\/15282","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/types\/product"}],"author":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/users\/29"}],"version-history":[{"count":0,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product\/15282\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/media\/15248"}],"wp:attachment":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/media?parent=15282"}],"wp:term":[{"taxonomy":"process","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/process?post=15282"},{"taxonomy":"solution","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/solution?post=15282"},{"taxonomy":"technology","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/technology?post=15282"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}