{"id":1863,"date":"2017-09-07T13:52:38","date_gmt":"2017-09-07T20:52:38","guid":{"rendered":"https:\/\/lamrstage.wpengine.com\/product\/vector-product-family\/"},"modified":"2021-08-04T10:20:11","modified_gmt":"2021-08-04T17:20:11","slug":"vector-product-family","status":"publish","type":"product","link":"https:\/\/www.lamresearch.com\/de\/product\/vector-product-family\/","title":{"rendered":"Vector Produktfamilie"},"content":{"rendered":"<p>Dielektrische Vorg\u00e4nge f\u00fcr Filmabscheidung werden verwendet, um einige der am schwersten herzustellenden Isolationsschichten in einem Halbleiterbauteil zu bilden, einschlie\u00dflich denjenigen, die in den neuesten Transistoren und 3D-Strukturen genutzt werden. Bei diesen Anwendungen m\u00fcssen die Fime eng um die filigranen Strukturen herum angelegt werden. Andere Anwendungen erfordern, dass die dielektrischen Schichten au\u00dfergew\u00f6hnlich glatt und defektfrei sind, da kleinste M\u00e4ngel sich in nachfolgenden Schichten stark vermehren.<\/p>\n<p>Lams VECTOR<sup>\u00ae<\/sup>-PECVD-Produkte bieten die Leistung und Produktivit\u00e4t, die n\u00f6tig ist, um diese Grundlagenstrukturen innerhalb vielf\u00e4ltiger und anspruchsvoller Bauteilanwendungen zu schaffen. F\u00fcr einige Anwendungen sind ausgew\u00e4hlte Modelle auch \u00fcber unsere Reliant<sup>\u00ae<\/sup> &#8211; Systeme als general\u00fcberholte Produkte erh\u00e4ltlich, wodurch niedrigere Betriebskosten mit der gleichen Qualit\u00e4t und Leistung wie bei neuen Systemen erzielt werden.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Unsere PECVD-Produktfamilie erm\u00f6glicht eine pr\u00e4zise dielektrische Filmabscheidung bei hoher Produktivit\u00e4t f\u00fcr eine Vielzahl von Anwendungen.<\/p>\n","protected":false},"author":31,"featured_media":10829,"parent":0,"menu_order":168,"template":"","meta":{"_acf_changed":false,"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":""},"process":[361],"solution":[634,634,321,325,315,330,333,349,345,352],"technology":[276],"class_list":{"0":"post-1863","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","5":"hentry","6":"process-deposition-de","7":"solution-advanced-packaging-de","9":"solution-analog-mixed-signal-de","10":"solution-discrete-power-devices-de","11":"solution-advanced-memory-de","12":"solution-interconnect-de","13":"solution-optoelectronics-photonics-de","14":"solution-sensors-transducers-de","15":"solution-patterning-de","16":"solution-transistor-de","17":"technology-plasma-enhanced-chemical-vapor-deposition-pecvd-de"},"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - 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