{"id":1868,"date":"2017-09-07T14:00:02","date_gmt":"2017-09-07T21:00:02","guid":{"rendered":"https:\/\/lamrstage.wpengine.com\/product\/versys-metal-product-family\/"},"modified":"2019-07-10T15:50:19","modified_gmt":"2019-07-10T22:50:19","slug":"versys-metal-product-family","status":"publish","type":"product","link":"https:\/\/www.lamresearch.com\/de\/product\/versys-metal-product-family\/","title":{"rendered":"VERSYS METAL PRODUKTFAMILIE"},"content":{"rendered":"<p>Metall\u00e4tzprozesse spielen eine Schl\u00fcsselrolle bei der Verbindung einzelner Komponenten, die einen integrierten Schaltkreis (IC) bilden, wie Verdrahtungen und elektrische Verbindungen. Diese Vorg\u00e4nge werden auch verwendet, um die Metallhartmasken (MHM) zu durchbohren, die f\u00fcr Strukturmuster verwendet werden, die f\u00fcr konventionelle Masken zu klein sind, wodurch ein kontinuierliches Schrumpfen der Strukturbreiten erm\u00f6glicht wird.<\/p>\n<p>Um diese kritischen \u00c4tzschritte durchf\u00fchren zu k\u00f6nnen, bietet Lams Produktfamilie Versys<sup>\u00ae<\/sup> Metal h\u00f6chste Produktivit\u00e4t auf einer flexiblen Plattform. F\u00fcr einige Anwendungen sind ausgew\u00e4hlte Modelle auch \u00fcber unsere Reliant<sup>\u00ae<\/sup>-Systeme als general\u00fcberholte Produkte erh\u00e4ltlich, wodurch niedrigere Betriebskosten mit der gleichen Qualit\u00e4t und Leistung wie bei neuen Systemen erzielt werden.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Diese Metall\u00e4tzprodukte bieten eine hervorragende Prozesskontrolle bei hoher Produktivit\u00e4t f\u00fcr elektrische Verbindungen und Metallhartmaskenanwendungen.<\/p>\n","protected":false},"author":31,"featured_media":10835,"parent":0,"menu_order":247,"template":"","meta":{"_acf_changed":false,"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":""},"process":[377],"solution":[632,321,325,315,330,345],"technology":[259],"class_list":["post-1868","product","type-product","status-publish","has-post-thumbnail","hentry","process-etch-de","solution-advanced-packaging","solution-analog-mixed-signal-de","solution-discrete-power-devices-de","solution-advanced-memory-de","solution-interconnect-de","solution-patterning-de","technology-reactive-ion-etch-de"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - 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Um den Anforderungen von Hartmasken und anderen BEOL-Metall\u00e4tzanwendungen gerecht zu werden, werden \u00c4tztechnologien mit anpassbaren Prozessen ben\u00f6tigt, die zugleich auch die Produktivit\u00e4t nicht au\u00dfer Acht lassen<\/p>\n","key_benefits":["Hochqualitative CD, Profilgleichm\u00e4\u00dfigkeit und Sicherstellung der Gleichm\u00e4\u00dfigkeit durch ein symmetrisches Kammerdesign mit unabh\u00e4ngiger Prozessanpassung\r\n","Hohe Verf\u00fcgbarkeit, hohe Ausbeute und au\u00dfergew\u00f6hnliche Prozesswiederholbarkeit mit patentierter Kammerreinigungstechnologie","Aufr\u00fcstbare Systeme f\u00fcr niedrige Betriebskosten \u00fcber mehrere Bauteilegenerationen \r\n"],"product_offerings":["Versys<sup>\u00ae<\/sup> Metal","Versys<sup>\u00ae<\/sup> Metal45\u2122","Versys<sup>\u00ae<\/sup> Metal L","Versys<sup>\u00ae<\/sup> Metal M"],"key_applications":["TiN-Metallhartmasken","Hoch verdichtete Aluminiumleitungen","Aluminium-Pad"],"featured_media_src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/Versys_Metal_Products_1920x600.jpg","drawer_background_image":{"id":10835,"src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/Versys_Metal_Products_1920x600.jpg"},"_links":{"self":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product\/1868","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/types\/product"}],"author":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/users\/31"}],"version-history":[{"count":0,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/product\/1868\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/media\/10835"}],"wp:attachment":[{"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/media?parent=1868"}],"wp:term":[{"taxonomy":"process","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/process?post=1868"},{"taxonomy":"solution","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/solution?post=1868"},{"taxonomy":"technology","embeddable":true,"href":"https:\/\/www.lamresearch.com\/de\/wp-json\/wp\/v2\/technology?post=1868"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}