{"id":15281,"date":"2021-01-27T12:56:08","date_gmt":"2021-01-27T20:56:08","guid":{"rendered":"https:\/\/lamrstage.wpengine.com\/?post_type=product&#038;p=15281"},"modified":"2024-08-28T11:23:03","modified_gmt":"2024-08-28T18:23:03","slug":"vantex","status":"publish","type":"product","link":"https:\/\/www.lamresearch.com\/ja\/product\/vantex\/","title":{"rendered":"VANTEX \u30b7\u30ea\u30fc\u30ba\u88fd\u54c1"},"content":{"rendered":"<p>\u8a98\u96fb\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u306e\u4e2d\u3067\u975e\u5c0e\u96fb\u7269\u8cea\u3092\u9664\u53bb\u3057\u307e\u3059\u3002\u7279\u306b\u696d\u754c\u6700\u5148\u7aef\u306e\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u306f\u3001 \u30db\u30fc\u30eb\u3084\u30c8\u30ec\u30f3\u30c1\u306e\u6df1\u3055\u306a\u3069\u306e\u96e3\u3057\u3044\u69cb\u9020\u3092\u3082\u3064\u305f\u3081\u3001\u53b3\u3057\u3044\u516c\u5dee\u3067\u88fd\u9020\u3055\u308c\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<p>\u30e9\u30e0\u30ea\u30b5\u30fc\u30c1\u306e\u6700\u65b0\u306e\u8a98\u96fb\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6bd4\u985e\u306e\u306a\u3044\u6027\u80fd\u3092\u5b9f\u73fe\u3057\u3001\u53b3\u3057\u3044\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u304c\u6c42\u3081\u3089\u308c\u308b\u30c7\u30d0\u30a4\u30b9\u306b\u751f\u7523\u6027\u3092\u3082\u305f\u3089\u3057\u307e\u3059\u3002Vantex<sup>\u2122<\/sup>\u306f\u3001\u9032\u5316\u3057\u305f\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306e\u8981\u4ef6\u306b\u5bfe\u5fdc\u3059\u308b\u9ad8\u5ea6\u306aRF\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3001\u5747\u4e00\u6027\u5236\u5fa1\u304a\u3088\u3073Equipment Intelligence<sup>\u00ae<\/sup>\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u8a98\u96fb\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u306e\u4e2d\u3067\u975e\u5c0e\u96fb\u7269\u8cea\u3092\u9664\u53bb\u3057\u307e\u3059\u3002\u7279\u306b\u696d\u754c\u6700\u5148\u7aef\u306e\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u306f\u3001 \u30db\u30fc\u30eb\u3084\u30c8\u30ec\u30f3\u30c1\u306e\u6df1\u3055\u306a\u3069\u306e\u96e3\u3057\u3044\u69cb\u9020\u3092\u3082\u3064\u305f\u3081\u3001\u53b3\u3057\u3044\u516c\u5dee\u3067\u88fd\u9020\u3055\u308c\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u30e9\u30e0\u30ea\u30b5\u30fc\u30c1\u306e\u6700\u65b0\u306e\u8a98\u96fb\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6bd4\u985e\u306e\u306a\u3044\u6027\u80fd\u3092\u5b9f\u73fe\u3057\u3001\u53b3\u3057\u3044\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u304c\u6c42\u3081\u3089\u308c\u308b\u30c7\u30d0\u30a4\u30b9\u306b\u751f\u7523\u6027\u3092\u3082\u305f\u3089\u3057\u307e\u3059\u3002Vantex\u2122\u306f\u3001\u9032\u5316\u3057\u305f\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306e\u8981\u4ef6\u306b\u5bfe\u5fdc\u3059\u308b\u9ad8\u5ea6\u306aRF\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3001\u5747\u4e00\u6027\u5236\u5fa1\u304a\u3088\u3073Equipment Intelligence\u00ae\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002 <\/p>\n","protected":false},"author":29,"featured_media":15249,"parent":0,"menu_order":13,"template":"","meta":{"_acf_changed":false,"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":""},"process":[379],"solution":[316],"technology":[788,260,740],"class_list":["post-15281","product","type-product","status-publish","has-post-thumbnail","hentry","process-etch-ja","solution-advanced-memory-ja","technology-788","technology-reactive-ion-etch-ja","technology-740"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>VANTEX \u30b7\u30ea\u30fc\u30ba\u88fd\u54c1 - Lam Research<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.lamresearch.com\/product\/vantex\/\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"VANTEX \u30b7\u30ea\u30fc\u30ba\u88fd\u54c1 - Lam Research\" \/>\n<meta property=\"og:description\" content=\"\u8a98\u96fb\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u306e\u4e2d\u3067\u975e\u5c0e\u96fb\u7269\u8cea\u3092\u9664\u53bb\u3057\u307e\u3059\u3002\u7279\u306b\u696d\u754c\u6700\u5148\u7aef\u306e\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u306f\u3001 \u30db\u30fc\u30eb\u3084\u30c8\u30ec\u30f3\u30c1\u306e\u6df1\u3055\u306a\u3069\u306e\u96e3\u3057\u3044\u69cb\u9020\u3092\u3082\u3064\u305f\u3081\u3001\u53b3\u3057\u3044\u516c\u5dee\u3067\u88fd\u9020\u3055\u308c\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u30e9\u30e0\u30ea\u30b5\u30fc\u30c1\u306e\u6700\u65b0\u306e\u8a98\u96fb\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6bd4\u985e\u306e\u306a\u3044\u6027\u80fd\u3092\u5b9f\u73fe\u3057\u3001\u53b3\u3057\u3044\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u304c\u6c42\u3081\u3089\u308c\u308b\u30c7\u30d0\u30a4\u30b9\u306b\u751f\u7523\u6027\u3092\u3082\u305f\u3089\u3057\u307e\u3059\u3002Vantex\u2122\u306f\u3001\u9032\u5316\u3057\u305f\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306e\u8981\u4ef6\u306b\u5bfe\u5fdc\u3059\u308b\u9ad8\u5ea6\u306aRF\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3001\u5747\u4e00\u6027\u5236\u5fa1\u304a\u3088\u3073Equipment Intelligence\u00ae\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\" \/>\n<meta property=\"og:url\" content=\"https:\/\/www.lamresearch.com\/product\/vantex\/\" \/>\n<meta property=\"og:site_name\" content=\"Lam Research\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/LamResearchCorporation\" \/>\n<meta property=\"article:modified_time\" content=\"2024-08-28T18:23:03+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"2560\" \/>\n\t<meta property=\"og:image:height\" content=\"1440\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:site\" content=\"@lamresearch\" \/>\n<meta name=\"twitter:label1\" content=\"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593\" \/>\n\t<meta name=\"twitter:data1\" content=\"1\u5206\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/vantex\\\/\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/vantex\\\/\",\"name\":\"VANTEX \u30b7\u30ea\u30fc\u30ba\u88fd\u54c1 - Lam Research\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/vantex\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/vantex\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/01\\\/Vantex-internal-chamber-croppedv1.jpg\",\"datePublished\":\"2021-01-27T20:56:08+00:00\",\"dateModified\":\"2024-08-28T18:23:03+00:00\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/vantex\\\/#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/vantex\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/vantex\\\/#primaryimage\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/01\\\/Vantex-internal-chamber-croppedv1.jpg\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/01\\\/Vantex-internal-chamber-croppedv1.jpg\",\"width\":2560,\"height\":1440},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/product\\\/vantex\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"https:\\\/\\\/www.lamresearch.com\\\/ja\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Products\",\"item\":\"https:\\\/\\\/www.lamresearch.com\\\/ko\\\/lam_products\\\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"VANTEX \u30b7\u30ea\u30fc\u30ba\u88fd\u54c1\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"name\":\"Lam Research\",\"description\":\"Engineering At The Atomic Scale\",\"publisher\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/www.lamresearch.com\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ja\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\",\"name\":\"Lam Research\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"width\":188,\"height\":30,\"caption\":\"Lam Research\"},\"image\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\"},\"sameAs\":[\"https:\\\/\\\/www.facebook.com\\\/LamResearchCorporation\",\"https:\\\/\\\/x.com\\\/lamresearch\",\"https:\\\/\\\/www.instagram.com\\\/lam_research\\\/\",\"https:\\\/\\\/www.linkedin.com\\\/company\\\/lam-research\",\"https:\\\/\\\/www.youtube.com\\\/user\\\/LamResearchCorp\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"VANTEX \u30b7\u30ea\u30fc\u30ba\u88fd\u54c1 - Lam Research","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.lamresearch.com\/product\/vantex\/","og_locale":"ja_JP","og_type":"article","og_title":"VANTEX \u30b7\u30ea\u30fc\u30ba\u88fd\u54c1 - Lam Research","og_description":"\u8a98\u96fb\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u30d7\u30ed\u30bb\u30b9\u306f\u3001\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u88fd\u9020\u306e\u4e2d\u3067\u975e\u5c0e\u96fb\u7269\u8cea\u3092\u9664\u53bb\u3057\u307e\u3059\u3002\u7279\u306b\u696d\u754c\u6700\u5148\u7aef\u306e\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u306f\u3001 \u30db\u30fc\u30eb\u3084\u30c8\u30ec\u30f3\u30c1\u306e\u6df1\u3055\u306a\u3069\u306e\u96e3\u3057\u3044\u69cb\u9020\u3092\u3082\u3064\u305f\u3081\u3001\u53b3\u3057\u3044\u516c\u5dee\u3067\u88fd\u9020\u3055\u308c\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u30e9\u30e0\u30ea\u30b5\u30fc\u30c1\u306e\u6700\u65b0\u306e\u8a98\u96fb\u4f53\u30a8\u30c3\u30c1\u30f3\u30b0\u30b7\u30b9\u30c6\u30e0\u306f\u3001\u6bd4\u985e\u306e\u306a\u3044\u6027\u80fd\u3092\u5b9f\u73fe\u3057\u3001\u53b3\u3057\u3044\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u304c\u6c42\u3081\u3089\u308c\u308b\u30c7\u30d0\u30a4\u30b9\u306b\u751f\u7523\u6027\u3092\u3082\u305f\u3089\u3057\u307e\u3059\u3002Vantex\u2122\u306f\u3001\u9032\u5316\u3057\u305f\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u88fd\u9020\u306e\u8981\u4ef6\u306b\u5bfe\u5fdc\u3059\u308b\u9ad8\u5ea6\u306aRF\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u3001\u5747\u4e00\u6027\u5236\u5fa1\u304a\u3088\u3073Equipment Intelligence\u00ae\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002","og_url":"https:\/\/www.lamresearch.com\/product\/vantex\/","og_site_name":"Lam Research","article_publisher":"https:\/\/www.facebook.com\/LamResearchCorporation","article_modified_time":"2024-08-28T18:23:03+00:00","og_image":[{"width":2560,"height":1440,"url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_site":"@lamresearch","twitter_misc":{"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"1\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.lamresearch.com\/product\/vantex\/","url":"https:\/\/www.lamresearch.com\/product\/vantex\/","name":"VANTEX \u30b7\u30ea\u30fc\u30ba\u88fd\u54c1 - Lam Research","isPartOf":{"@id":"https:\/\/www.lamresearch.com\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.lamresearch.com\/product\/vantex\/#primaryimage"},"image":{"@id":"https:\/\/www.lamresearch.com\/product\/vantex\/#primaryimage"},"thumbnailUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","datePublished":"2021-01-27T20:56:08+00:00","dateModified":"2024-08-28T18:23:03+00:00","breadcrumb":{"@id":"https:\/\/www.lamresearch.com\/product\/vantex\/#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.lamresearch.com\/product\/vantex\/"]}]},{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/www.lamresearch.com\/product\/vantex\/#primaryimage","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","width":2560,"height":1440},{"@type":"BreadcrumbList","@id":"https:\/\/www.lamresearch.com\/product\/vantex\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"https:\/\/www.lamresearch.com\/ja\/"},{"@type":"ListItem","position":2,"name":"Products","item":"https:\/\/www.lamresearch.com\/ko\/lam_products\/"},{"@type":"ListItem","position":3,"name":"VANTEX \u30b7\u30ea\u30fc\u30ba\u88fd\u54c1"}]},{"@type":"WebSite","@id":"https:\/\/www.lamresearch.com\/#website","url":"https:\/\/www.lamresearch.com\/","name":"Lam Research","description":"Engineering At The Atomic Scale","publisher":{"@id":"https:\/\/www.lamresearch.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.lamresearch.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ja"},{"@type":"Organization","@id":"https:\/\/www.lamresearch.com\/#organization","name":"Lam Research","url":"https:\/\/www.lamresearch.com\/","logo":{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","width":188,"height":30,"caption":"Lam Research"},"image":{"@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.facebook.com\/LamResearchCorporation","https:\/\/x.com\/lamresearch","https:\/\/www.instagram.com\/lam_research\/","https:\/\/www.linkedin.com\/company\/lam-research","https:\/\/www.youtube.com\/user\/LamResearchCorp"]}]}},"process_terms":[{"term_id":379,"name":"\u30a8\u30c3\u30c1\u30f3\u30b0","slug":"etch-ja","taxonomy":"process","parent":0,"order":0}],"solution_terms":[{"term_id":316,"name":"\u9ad8\u5ea6\u306a\u30e1\u30e2\u30ea","slug":"advanced-memory-ja","taxonomy":"solution","parent":0,"order":0}],"technology_terms":[{"term_id":788,"name":"\u30af\u30e9\u30a4\u30aa\u30a8\u30c3\u30c1\u30f3\u30b0","slug":"%e3%82%af%e3%83%a9%e3%82%a4%e3%82%aa%e3%82%a8%e3%83%83%e3%83%81%e3%83%b3%e3%82%b0","taxonomy":"technology","parent":0,"order":0},{"term_id":260,"name":"\u30ea\u30a2\u30af\u30c6\u30a3\u30d6\u30fb\u30a4\u30aa\u30f3\u30a8\u30c3\u30c1\u30f3\u30b0\uff08RIE\uff09","slug":"reactive-ion-etch-ja","taxonomy":"technology","parent":0,"order":0},{"term_id":740,"name":"\u6975\u4f4e\u6e29\u30a8\u30c3\u30c1\u30f3\u30b0","slug":"%e6%a5%b5%e4%bd%8e%e6%b8%a9%e3%82%a8%e3%83%83%e3%83%81%e3%83%b3%e3%82%b0","taxonomy":"technology","parent":0,"order":0}],"industry_challenges":"<p>\u30d3\u30c3\u30c8\u3042\u305f\u308a\u306e\u30e1\u30e2\u30ea\u30b3\u30b9\u30c8\u306e\u524a\u6e1b\u5897\u6e1b  \u306b\u304a\u3044\u3066\u306f\u3001\u30c7\u30d0\u30a4\u30b9\u8a2d\u8a08\u306b\u304a\u3051\u308b\u30a2\u30b0\u30ec\u30c3\u30b7\u30d6\u306a\u5782\u76f4\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u3084\u3001\u8907\u6570\u306e\u5f62\u72b6\u6a5f\u80fd\u3092\u540c\u6642\u306b\u30a8\u30c3\u30c1\u30f3\u30b0\u3057\u8907\u96d1\u306a\u65b0\u3057\u3044\u7d71\u5408\u30b9\u30ad\u30fc\u30e0\u3092\u5b9f\u884c\u3059\u308b\u306a\u3069\u306e\u8ab2\u984c\u306b\u5bfe\u51e6\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u5782\u76f4\u30b9\u30b1\u30fc\u30ea\u30f3\u30b0\u306f\u3001\u6a2a\u65b9\u5411\u306e\u30c7\u30d0\u30a4\u30b9\u5bc6\u5ea6\u3092\u7dad\u6301\u3067\u304d\u308b\u3088\u3046\u540c\u3058CD\u30ec\u30d9\u30eb\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u65b0\u3057\u3044\u30ec\u30d9\u30eb\u306e\u6df1\u3055\u307e\u3067\u30a8\u30c3\u30c1\u30f3\u30b0\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n<p>\u30a4\u30aa\u30f3\u5165\u5c04\u89d2\u306e\u308f\u305a\u304b\u306a\u5dee\u306b\u3088\u3063\u3066\u5f62\u72b6\u6a5f\u80fd\u304c\u5927\u304d\u304f\u5909\u308f\u308a\u3001\u6b69\u7559\u307e\u308a\u306e\u4f4e\u4e0b\u306b\u3064\u306a\u304c\u308b\u53ef\u80fd\u6027\u304c\u3042\u308b\u305f\u3081\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u306e\u5782\u76f4\u6307\u5411\u6027\u304c\u91cd\u8981\u306b\u306a\u308a\u307e\u3059\u3002\u8907\u6570\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u7d44\u307f\u5408\u308f\u305b\u3066\u3001\u30b3\u30b9\u30c8\u3092\u524a\u6e1b\u3059\u308b\u306b\u306f\u3001\u7570\u306a\u308bCD\u3068\u5f62\u72b6\u3067\u540c\u6642\u306b\u3053\u306e\u30d1\u30d5\u30a9\u30fc\u30de\u30f3\u30b9\u3092\u5b9f\u73fe\u3055\u305b\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002\u304a\u5ba2\u69d8\u306e\u9ad8\u5ea6\u306a\u7d71\u5408\u30b9\u30ad\u30fc\u30e0\u306b\u3088\u308a\u3001\u8907\u6570\u306e\u6750\u6599\u304c\u9732\u51fa\u3059\u308b\u8907\u96d1\u3055\u304c\u5897\u3057\u3001\u9078\u629e\u6027\u5236\u5fa1\u3092\u5f37\u5316\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n","key_benefits":["\u53b3\u3057\u3044CD\u5236\u5fa1\u3068\u9078\u629e\u529b\u3067\u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u3067\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u5b9f\u73fe","\u9ad8\u3044\u30a8\u30c3\u30c1\u30f3\u30b0\u30ec\u30fc\u30c8\u3068\u5236\u5fa1\u529b\u306b\u3088\u308b\u3001\u751f\u7523\u6027\u306e\u5411\u4e0a","\u9ad8\u5ea6\u306aEquipment Intelligence\u30c6\u30af\u30ce\u30ed\u30b8\u30fc\u306b\u3088\u308a\u3001\u30a6\u30a7\u30cf\u30fc\u4e0a\u3068\u30a6\u30a7\u30cf\u30fc\u9593\u306e\u6027\u80fd\u3092\u5411\u4e0a"],"product_offerings":["Vantex<sup>\u2122<\/sup>"],"key_applications":["3D NAND \u9ad8\u30a2\u30b9\u30da\u30af\u30c8\u6bd4\u30db\u30fc\u30eb\u3001\u30c8\u30ec\u30f3\u30c1\u3001\u30b3\u30f3\u30bf\u30af\u30c8","\u30ad\u30e3\u30d1\u30b7\u30bf\u30bb\u30eb"],"featured_media_src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg","drawer_background_image":{"id":15249,"src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/01\/Vantex-internal-chamber-croppedv1.jpg"},"_links":{"self":[{"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/product\/15281","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/types\/product"}],"author":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/users\/29"}],"version-history":[{"count":0,"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/product\/15281\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/media\/15249"}],"wp:attachment":[{"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/media?parent=15281"}],"wp:term":[{"taxonomy":"process","embeddable":true,"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/process?post=15281"},{"taxonomy":"solution","embeddable":true,"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/solution?post=15281"},{"taxonomy":"technology","embeddable":true,"href":"https:\/\/www.lamresearch.com\/ja\/wp-json\/wp\/v2\/technology?post=15281"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}