{"id":15274,"date":"2021-01-27T12:56:08","date_gmt":"2021-01-27T20:56:08","guid":{"rendered":"https:\/\/lamrstage.wpengine.com\/?post_type=product&#038;p=15274"},"modified":"2024-08-28T11:25:01","modified_gmt":"2024-08-28T18:25:01","slug":"vantex","status":"publish","type":"product","link":"https:\/\/www.lamresearch.com\/ko\/product\/vantex\/","title":{"rendered":"VANTEX \uc81c\ud488\uad70"},"content":{"rendered":"<p>\ubc18\ub3c4\uccb4 \uc18c\uc790 \uc81c\uc870 \uc2dc \uc720\uc804\uccb4 \uc2dd\uac01(dielectric etch) \uacf5\uc815\uc5d0\uc11c\ub294 \ube44\uc804\ub3c4\uc131 \ubb3c\uc9c8\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4. \ucca8\ub2e8 \uba54\ubaa8\ub9ac \uc18c\uc790\ub294 \ud2b9\ud788 \uadf8 \uad6c\uc870\uac00 \ub9e4\uc6b0 \uae4c\ub2e4\ub86d\uc2b5\ub2c8\ub2e4. \ud640(hole)\uc774\ub098 \ud2b8\ub80c\uce58(trench) \uac19\uc740 \uacbd\uc6b0\ub294 \uae4a\uc774\uac00 \ub9e4\uc6b0 \uae4a\uc5b4 \uc5c4\uaca9\ud55c \ud5c8\uc6a9\uc624\ucc28\ub97c \ub450\uace0 \uc81c\uc870\ud574\uc57c \ud569\ub2c8\ub2e4. <\/p>\n<p>\ub7a8\ub9ac\uc11c\uce58\uc758 \ucd5c\uc2e0 \uc720\uc804\uccb4 \uc2dd\uac01 \uc2dc\uc2a4\ud15c\uc740 \uc131\ub2a5\uacfc \uc0dd\uc0b0\uc131\uc774 \ub9e4\uc6b0 \ub6f0\uc5b4\ub098 \uac00\uc7a5 \ud575\uc2ec\uc801\uc778 \uace0\uc885\ud6a1\ube44(high aspect ratio)\uc758 \uc18c\uc790 \ud53c\ucc98(feature)\ub97c \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4. 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