{"id":1885,"date":"2017-09-07T13:49:32","date_gmt":"2017-09-07T20:49:32","guid":{"rendered":"https:\/\/lamrstage.wpengine.com\/product\/altus-product-family\/"},"modified":"2025-04-10T12:02:26","modified_gmt":"2025-04-10T19:02:26","slug":"altus-product-family","status":"publish","type":"product","link":"https:\/\/www.lamresearch.com\/ko\/product\/altus-product-family\/","title":{"rendered":"ALTUS \uc81c\ud488\uad70"},"content":{"rendered":"<p>\uc2dc\uc7a5\uc744 \uc120\ub3c4\ud558\ub294 \ub7a8\ub9ac\uc11c\uce58\uc758 ALTUS<sup>\u00ae<\/sup> \uc2dc\uc2a4\ud15c\uc740 CVD \ubc0f ALD \uae30\uc220\uc744 \uacb0\ud569\ud558\uc5ec \ucca8\ub2e8 \uae08\uc18d \ubd84\uc11d \uc751\uc6a9 \ubd84\uc57c\uc5d0 \uc694\uad6c\ub418\ub294 \uc815\ubc00\ud558\uac8c \ubc15\ub9c9\uc744 \uc99d\ucc29\ud569\ub2c8\ub2e4.<\/p>\n<p>\ubab0\ub9ac\ube0c\ub374(Mo)\uc740 ALD(\uc6d0\uc790\uce35 \uc99d\ucc29) \ubc29\uc2dd\uc744 \ud1b5\ud574 \uc18c\uc790 \uad6c\uc870\uc5d0 \ub354\uc6b1 \uc815\ubc00\ud55c \ud544\ub9c1\uc744 \uad6c\ud604\ud569\ub2c8\ub2e4.  \ub610\ud55c \ube44\ubd88\uc18c\uacc4 \ud560\ub85c\uac90\ud654\ubb3c \uc804\uad6c\uccb4\ub85c \uc99d\ucc29\ud560 \uc218 \uc788\uc73c\ubbc0\ub85c \uc77c\ubd80 \ud145\uc2a4\ud150 \uc751\uc6a9 \ubd84\uc57c\uc5d0\uc11c \ubc1c\uc0dd\ud558\ub294 \uc720\uc804\uccb4 \uc190\uc0c1\uc744 \ubc29\uc9c0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.  \uc5d0\uce58\ubc31(etchback) \ubc0f \ud654\ud559-\uae30\uacc4\uc801 \ud3c9\ud0c4\ud654(CMP) \uacf5\uc815\uc740 \uc54c\ub824\uc9c4 \ud654\ud559\ubb3c\uc9c8 \ubc0f \uc7a5\ube44 \uc138\ud2b8\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc870 \uacf5\uc815 \ud750\ub984\uc5d0 \ub354\uc6b1 \ube60\ub974\uac8c \ud1b5\ud569\ub429\ub2c8\ub2e4.<\/p>\n<p>\ud145\uc2a4\ud150 \uc99d\ucc29\uc740 \ubc18\ub3c4\uccb4\uc758 \uc811\ucd09, \ube44\uc544, \ud50c\ub7ec\uadf8\uc640 \uac19\uc740 \uc804\ub3c4\uc131 \ud2b9\uc131\uc744 \ud615\uc131\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.  \uc774\ub7ec\ud55c \ud2b9\uc131\uc740 \uc791\uace0 \uc881\uc73c\uba70 \uc18c\ub7c9\uc758 \uae08\uc18d\uc744 \uc0ac\uc6a9\ud558\uae30 \ub54c\ubb38\uc5d0, \uc800\ud56d\uc744 \ucd5c\uc18c\ud654\ud558\uace0 \uc644\uc804\ud55c \ud544\ub9c1\uc744 \uad6c\ud604\ud558\ub294 \ub370 \uc5b4\ub824\uc6c0\uc774 \uc788\uc2b5\ub2c8\ub2e4.  \ub098\ub178 \uc2a4\ucf00\uc77c\uc5d0\uc11c\ub294 \uc57d\uac04\uc758 \uacb0\ud568\ub3c4 \uc7a5\uce58 \uc131\ub2a5\uc5d0 \uc601\ud5a5\uc744 \ubbf8\uce58\uac70\ub098 \ubc18\ub3c4\uccb4 \uae30\ub2a5 \ubb38\uc81c\ub97c \ucd08\ub798\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>CVD \ubc0f ALD \uae30\uc220\uc744 \uacb0\ud569\ud558\uc5ec \uc2dc\uc7a5\uc744 \uc120\ub3c4\ud558\ub294 \uc774 \uc2dc\uc2a4\ud15c\uc740 \uace0\uae09 \ud145\uc2a4\ud150 \uae08\uc18d\ud654 \uc751\uc6a9 \ubd84\uc57c\ub97c \uc704\ud55c \uace0\ub3c4\uc758 \ub4f1\uac01 \uae08\uc18d \ubc15\ub9c9\uc744 \uc99d\ucc29\ud569\ub2c8\ub2e4.<\/p>\n","protected":false},"author":31,"featured_media":10518,"parent":0,"menu_order":183,"template":"","meta":{"_acf_changed":false,"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":""},"process":[358],"solution":[314,681,331,356],"technology":[300,311],"class_list":["post-1885","product","type-product","status-publish","has-post-thumbnail","hentry","process-deposition-ko","solution-advanced-memory-ko","solution-advanced-packaging-ko","solution-interconnect-ko","solution-transistor-ko","technology-chemical-vapor-deposition-cvd-ko","technology-atomic-layer-deposition-ald-ko"],"acf":[],"yoast_head":"<!-- This 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\uc788\uc2b5\ub2c8\ub2e4.  \uc644\uc804\ud788 \ud544\ub9c1\ub41c \uc791\uc740 \ud53c\ucc98\uc870\ucc28\ub3c4 \ud145\uc2a4\ud150\uc774 \uc801\uac8c \ucc44\uc6cc\uc838 \uc811\ucd09 \uc800\ud56d\uc774 \uc99d\uac00\ud558\ub294 \ubb38\uc81c\uac00 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p style=\"margin-top: 1em\">\ucca8\ub2e8 \uba54\ubaa8\ub9ac \ubc0f \ub85c\uc9c1 \ud2b9\uc131\uc740 \uc644\uc804\ud558\uace0 \uacb0\ud568\uc774 \uc5c6\ub294 \ud145\uc2a4\ud150 \ud544\ub9c1\uc744 \uac00\ub2a5\ud558\uac8c \ud558\uace0 \ub3d9\uc2dc\uc5d0 \ubc8c\ud06c \ud145\uc2a4\ud150\uc758 \uc800\ud56d\uc744 \uac10\uc18c\uc2dc\ud0a4\ub294 \uc99d\ucc29 \uae30\uc220\uc744 \uc694\uad6c\ud569\ub2c8\ub2e4.  \uc811\ucd09 \ud544\ub9c1\uc744 \ud5a5\uc0c1\ud558\uace0 \uc811\ucd09 \uc800\ud56d\uc744 \uc904\uc774\uae30 \uc704\ud574\uc11c\ub294 \uc587\uc740 \ub450\uaed8(\ubb3c\ub9ac\uc801 \uc99d\uae30 \uc99d\ucc29(PVD)\/CVD \ubc30\ub9ac\uc5b4 \ubc15\ub9c9\uacfc \ube44\uad50 \uc2dc)\uc5d0\uc11c \uc801\uc808\ud55c \ubc30\ub9ac\uc5b4 \uc2a4\ud15d \ucee4\ubc84\ub9ac\uc9c0\ub97c \uad6c\ud604\ud574\uc57c \ud569\ub2c8\ub2e4.<\/p>\n<p style=\"margin-top: 1em;margin-bottom: 40px\"> \ub354\uc6b1 \uc9c4\ubcf4\ub41c \ucef4\ud4e8\ud305 \uae30\uc220\uc5d0 \ub300\ud55c \uc218\uc694\uac00 \uae09\uaca9\ud558\uac8c \uc99d\uac00\ud558\uace0 \uc788\uc73c\uba70 \uc624\ub298\ub0a0\uc758 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5c5\uccb4\ub4e4\uc740 \uc2a4\ucf00\uc77c \uacbd\uc7c1\uc5d0\uc11c \ud55c\uacc4\uae4c\uc9c0 \ubc00\uc5b4\ubd99\uc774\uba70 \uac00\ub2a5\ud55c \ubaa8\ub4e0 \ubc29\ubc95\uc744 \uc2dc\ub3c4\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3>\ubab0\ub9ac\ube0c\ub374\uc744 \uc0ac\uc6a9\ud558\ub294 \uc774\uc720<\/h3>\n<p style=\"margin-top: 1em\">NAND, DRAM \ubc0f \ub85c\uc9c1 \ud2b9\uc131 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\uae30 \uc704\ud574\uc11c\ub294 \uc0c8\ub85c\uc6b4 \uc99d\ucc29 \uae30\uc220\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.  \uae30\uc874\uc758 \uae08\uc18d\ud654 \ubc29\uc2dd\uc740 \uc774\ub7ec\ud55c \uc2a4\ucf00\uc77c\ub9c1 \uc694\uad6c\ub97c \ucda9\uc871\ud558\uc9c0 \ubabb\ud558\ubbc0\ub85c \uc5c5\uacc4\uc5d0\uc11c\ub294 \uc138 \uac00\uc9c0 \ucd5c\ucca8\ub2e8 \uc9d1\uc801 \ud68c\ub85c(IC) \uc720\ud615\uc5d0 \ubab0\ub9ac\ube0c\ub374(Mo) \uae08\uc18d\ud654\ub97c \uc801\uc6a9\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p style=\"margin-top: 1em\">\uadf8\ub7ec\ub098 ALD \ub3c4\uad6c\ub97c \uc0ac\uc6a9\ud558\ub294 \uc81c\uc870 \uacf5\uc815\uc5d0 \ubab0\ub9ac\ube0c\ub374\uc744 \uc801\uc6a9\ud558\uae30 \uc704\ud574\uc11c\ub294 \uc0c1\ub2f9\ud55c \ud601\uc2e0\uc774 \ud544\uc694\ud569\ub2c8\ub2e4.  \uc774\ub7ec\ud55c \uacfc\uc81c\uc5d0\ub294 \ub2e4\uc74c\uc774 \ud3ec\ud568\ub429\ub2c8\ub2e4.  \uc774\ub97c \uc704\ud574 \uace0\uc628 \uc801\uc6a9 \ub2a5\ub825, \uace0\uae09 \ubc18\uc751\uae30 \ubc0f \uacf5\uc815 \uc21c\uc11c \uc124\uacc4 \ub2a5\ub825, \uc6e8\uc774\ud37c \uc628\ub3c4 \uc815\ubc00 \uc81c\uc5b4\ud558\ub294 \ub2a5\ub825, \ub2e4\uc591\ud55c \ud654\ud559\ubb3c\uc9c8 \ucc98\ub9ac\ub97c \ud1b5\ud55c \ubab0\ub9ac\ube0c\ub374(Mo) \uace0\uccb4 \uc804\uad6c\uccb4\ub97c \ub300\ub7c9\uc73c\ub85c \uacf5\uae09\ud560 \uc218 \uc788\ub294 \ub2a5\ub825\uc774 \uc694\uad6c\ub429\ub2c8\ub2e4.<\/p>\n<p><a href=\"https:\/\/www.lamresearch.com\/ko\/products\/our-solutions\/metallization\/\">\uc790\uc138\ud55c \ub0b4\uc6a9\uc740 \uae08\uc18d\ud654 \uc194\ub8e8\uc158 \ud398\uc774\uc9c0\ub97c \ucc38\uc870\ud558\uc2ed\uc2dc\uc624<\/a><\/p>\n","key_benefits":["\ub77c\uc774\ub108 \ubc0f \ubc8c\ud06c\uc6a9 \uc21c\ucc28 \ucc98\ub9ac \ubc0f \ub2e4\uc911 \uc628\ub3c4 \uc99d\ucc29\uc744 \ud1b5\ud55c \uacf5\uc815 \uc720\uc5f0\uc131\uacfc \uc0dd\uc0b0\uc131\uc744 \uc704\ud55c 4\ub2e8 \ubaa8\ub4c8(QSM) \uc544\ud0a4\ud14d\ucc98","\uace0\uae09 ALD \ud544\ub9c1 \uae30\uc220  ","\uace0\uc628 \uc9c4\uacf5 \ud074\ub7a8\ud551 \uc138\ub77c\ubbf9 \ubc1b\uce68\ub300\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc6e8\uc774\ud37c \ud728 \uad00\ub9ac\ub85c \ub6f0\uc5b4\ub09c \uc5f4 \uade0\uc77c\uc131 \uc81c\uacf5, \ud6c4\uba74 \uc99d\ucc29 \ubc29\uc9c0","\uc11c\ube0c \ud339 \uc2b9\ud654 \uc2dc\uc2a4\ud15c\uc744 \ud1b5\ud55c \uc804\uad6c\uccb4 \uc804\ub2ec \ubc0f \uc774\ub97c \ud1b5\ud55c \ud339 \uba74\uc801 \ucd95\uc18c \ubc0f \uc911\ub2e8 \uc5c6\uc774 \uc804\uad6c\uccb4 \uc570\ud50c \uad50\uccb4","\ud601\uc2e0\uc801\uc73c\ub85c \uac1c\uc120\ub41c \ud654\ud559\uc801 \uc2dd\uac01(ACE)\uc744 \uc774\uc6a9\ud55c \ud1b5\ud569 \uc138\uc815","\ub2e4\uc911 \ubaa8\ub4c8, \ub2e4\uc911 \uc628\ub3c4 \uc21c\ucc28 \ub610\ub294 \ubc30\uce58 \uacf5\uc815","\uc5f4 \ubc0f \ud50c\ub77c\uc988\ub9c8 Mo ALD","CCP(Capacitively Coupled Plasma) \ubc0f \uc6d0\uaca9 \ud50c\ub77c\uc988\ub9c8 \uc804\ucc98\ub9ac \uc635\uc158","\ud50c\ub7ab\ud3fc \uad6c\uc131 \uc720\uc5f0\uc131","\ud145\uc2a4\ud150 \ubc15\ub9c9 \uc0dd\uc0b0\uc131\uc5d0 \ub300\ud55c \uc5c5\uacc4 \ubca4\uce58\ub9c8\ud06c\n","\ub7a8\ub9ac\uc11c\uce58\uc758 \ud384\uc2a4 \ubc29\uc2dd \ud575 \ud615\uc131\uce35(PNL) ALD \uacf5\uc815\uacfc \ud2b9\ud5c8\ubc1b\uc740 \ub2e4\ub2e8\uacc4 \uc21c\ucc28 \uc99d\ucc29(MSSD) \uc544\ud0a4\ud14d\ucc98\ub97c \ud1b5\ud574 \ud615\uc131\ub41c \ud575 \ud615\uc131\uce35 \ubc0f \ud604\uc7a5 CVD \ub300\ub7c9 \ud544\ub9c1 \ubc29\uc2dd\n","ALD\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc587\uc740 \ud145\uc2a4\ud150(W) \ubc15\ub9c9\uc758 \ub450\uaed8\ub97c \uc904\uc774\uace0 CVD \ubc8c\ud06c \ud544\ub9c1 \uc785\uc790 \uc131\uc7a5\uc744 \ubcc0\uacbd\ud568\uc73c\ub85c\uc368 \uc804\uccb4 \uc800\ud56d\uc744 \ub0ae\ucda4\n","\uc800\ubd88\uc18c, \uc800\uc751\ub825 \ud145\uc2a4\ud150(W) \ud544\ub9c1\uc73c\ub85c \ucca8\ub2e8 3D NAND \ubc0f DRAM \uc9c0\uc6d0\n","WN \ubc15\ub9c9 \uc99d\ucc29 \uc2dc ALD\ub97c \uc0ac\uc6a9\ud558\uc5ec \uae30\uc874 \ubc30\ub9ac\uc5b4 \ubc15\ub9c9\ubcf4\ub2e4 \uc587\uc544\uc9c4 \ub450\uaed8\uc5d0\uc11c\ub3c4 \ub192\uc740 \uc2a4\ud15d \ucee4\ubc84\ub9ac\uc9c0 \uad6c\ud604\n"],"product_offerings":["ALTUS<sup>\u00ae<\/sup> Halo","Concept Two<sup>\u00ae<\/sup> 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