Wet Clean/Strip/Etch Archives - Lam Research
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Technology: Wet Clean/Strip/Etch

DV-Prime & Da Vinci Product Families

Wet Clean/Strip/Etch

These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.

Galaxy Product Family

Wet Clean/Strip/Etch

The Galaxy platform combines years of experience in batch wafer processing with advanced process control typically only found on single wafer tools.

Kallisto Product Family

Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch

An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.

Phoenix Product Family

Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Reliant Clean Products

Reliant Systems Wet Clean/Strip/Etch

Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

SP Series Product Family

Wet Clean/Strip/Etch

This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.

Triton Product Family

Electrochemical Deposition (ECD) Wet Clean/Strip/Etch

The Triton platform is a versatile and modular solution for single wafer plating and wet processing.

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