These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.
The Galaxy platform combines years of experience in batch wafer processing with advanced process control typically only found on single wafer tools.
Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch
An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.
Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.
Reliant Systems Wet Clean/Strip/Etch
Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.
Electrochemical Deposition (ECD) Wet Clean/Strip/Etch
The Triton platform is a versatile and modular solution for single wafer plating and wet processing.