Technology: Wet Clean/Strip/Etch
DV-Prime & Da Vinci Product Families
Wet Clean/Strip/Etch
These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.
Galaxy Product Family
Wet Clean/Strip/Etch
The Galaxy platform combines years of experience in batch wafer processing with advanced process control typically only found on single wafer tools.
Kallisto Product Family
Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch
An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.
Phoenix Product Family
Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch
Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.
Reliant Clean Products
Reliant Systems Wet Clean/Strip/Etch
Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
SP Series Product Family
Wet Clean/Strip/Etch
This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.
Triton Product Family
Electrochemical Deposition (ECD) Wet Clean/Strip/Etch
The Triton platform is a versatile and modular solution for single wafer plating and wet processing.