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\u963b\u9694\uff09\u7684\u8f83\u4f4e\u7535\u963b\u7387\u90fd\u662f\u5fc5\u9700\u7684\u3002<\/p>\n<p style=\"margin-top: 1em;margin-bottom: 40px\"> \u5bf9\u66f4\u5148\u8fdb\u8ba1\u7b97\u80fd\u529b\u7684\u9700\u6c42\u6b63\u5728\u5927\u5e45\u589e\u52a0\uff0c\u5f53\u4eca\u7684\u82af\u7247\u5236\u9020\u5546\u6b63\u5728\u89c4\u6a21\u5316\u7ade\u4e89\u4e2d\u4e0d\u65ad\u7a81\u7834\u53ef\u80fd\u7684\u754c\u9650\u3002<\/p>\n<h3>\u4e3a\u4ec0\u4e48\u9009\u62e9\u94bc<\/h3>\n<p style=\"margin-top: 1em\">\u4e3a\u6ee1\u8db3 NAND\u3001DRAM \u548c\u903b\u8f91\u7279\u5f81\u7684\u8981\u6c42\uff0c\u9700\u8981\u4e0d\u540c\u7684\u6c89\u79ef\u6280\u672f\u3002  \u4f20\u7edf\u7684\u91d1\u5c5e\u5316\u65b9\u6848\u65e0\u6cd5\u6ee1\u8db3\u8fd9\u4e9b\u5fae\u7f29\u8981\u6c42\uff0c\u56e0\u6b64\u884c\u4e1a\u6b63\u5728\u6240\u6709\u4e09\u79cd\u524d\u6cbf IC \u5668\u4ef6\u7c7b\u578b\u4e2d\u5b9e\u65bd\u94bc (Mo) \u91d1\u5c5e\u5316\u3002<\/p>\n<p style=\"margin-top: 1em\">\u4f46\u662f\uff0c\u8981\u4f7f\u94bc\u5728\u4f7f\u7528 ALD \u7684\u8bbe\u5907\u4e2d\u8fdb\u884c\u5236\u9020\u53d8\u5f97\u53ef\u884c\uff0c\u9700\u8981\u8fdb\u884c\u91cd\u5927\u521b\u65b0\u3002  \u8fd9\u4e9b\u6311\u6218\u5305\u62ec\uff1a  \u80fd\u591f\u65bd\u52a0\u9ad8\u6e29\uff0c\u5b9e\u73b0\u5148\u8fdb\u7684\u53cd\u5e94\u5668\u548c\u5de5\u827a\u5e8f\u5217\u8bbe\u8ba1\uff0c\u80fd\u591f\u7cbe\u786e\u63a7\u5236\u6676\u5706\u6e29\u5ea6\uff0c\u5e76\u901a\u8fc7\u5404\u79cd\u5316\u5b66\u5904\u7406\u63d0\u4f9b\u94bc\u56fa\u4f53\u524d\u4f53\u7684\u6279\u91cf\u8f93\u9001\u3002<\/p>\n<p><a href=\"https:\/\/www.lamresearch.com\/zh-hans\/products\/our-solutions\/metallization\/\">\u6709\u5173\u66f4\u591a\u4fe1\u606f\uff0c\u8bf7\u8bbf\u95ee\u201c\u91d1\u5c5e\u5316\u89e3\u51b3\u65b9\u6848\u201d\u9875\u9762<\/a><\/p>\n","key_benefits":["\u56db\u7ad9\u6a21\u5757 (QSM) 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ALD","\u7535\u5bb9\u8026\u5408\u7b49\u79bb\u5b50\u4f53 (CCP) \u548c\u8fdc\u7a0b\u7b49\u79bb\u5b50\u4f53\u9884\u5904\u7406\u9009\u9879","\u5e73\u53f0\u914d\u7f6e\u7075\u6d3b\u6027","\u4e1a\u754c\u6807\u7aff\u7684\u94a8\u8584\u819c\u5236\u7a0b\u751f\u4ea7\u529b\n","\u5229\u7528\u6cdb\u6797\u96c6\u56e2\u7684\u8109\u51b2\u5f0f\u6210\u6838\u5c42(pulsed nucleation layer\uff0cPNL)\u539f\u5b50\u5c42\u6c89\u79ef\u5236\u7a0b(ALD)\u5236\u7a0b\u4ea7\u751f\u6210\u6838\u5c42(nucleation layer)\uff0c\u5e76\u4ee5\u4e13\u5229\u7684\u591a\u7ad9\u5e8f\u5217\u5f0f\u6c89\u79ef(MSSD)\u67b6\u6784\u5b9e\u73b0\u539f\u4f4d\u5757\u4f53CVD\u586b\u5145\u5236\u7a0b\n","\u5229\u7528ALD\u5236\u7a0b\u6765\u51cf\u5c11\u8584\u819c\u539a\u5ea6\uff0c\u4ee5\u964d\u4f4e\u8f83\u8584\u7684\u94a8\u8584\u819c\u7684\u6574\u4f53\u7535\u963b\u7387\uff0c\u5e76\u6539\u53d8CVD\u5236\u7a0b\u7684\u5757\u4f53\u586b\u5145\u7684\u6676\u683c\u751f\u957f\u65b9\u5f0f\n","\u4e3a\u5b9e\u73b0\u5148\u8fdb3D 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