{"id":1837,"date":"2017-09-07T13:57:15","date_gmt":"2017-09-07T20:57:15","guid":{"rendered":"https:\/\/lamrstage.wpengine.com\/product\/sola-product-family\/"},"modified":"2021-03-24T17:20:56","modified_gmt":"2021-03-25T00:20:56","slug":"sola-product-family","status":"publish","type":"product","link":"https:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/","title":{"rendered":"SOLA\u7cfb\u5217\u7522\u54c1"},"content":{"rendered":"<p>\u70ba\u6eff\u8db3\u6700\u65b0\u6676\u7247\u7684\u7d55\u7de3\u9700\u6c42\u6240\u958b\u767c\u7684\u65b0\u6b3e\u4ecb\u96fb\u6750\u6599\u537b\u5f80\u5f80\u5177\u5099\u4e86\u96e3\u4ee5\u4f7f\u7528\u7684\u7279\u6027\u3002\u9019\u4e9b\u8584\u819c\u8106\u5f31\u3001\u5bb9\u6613\u53d7\u640d\uff0c\u4e14\u6703\u5931\u53bb\u90e8\u5206\u7684\u7d55\u7de3\u80fd\u529b\uff0c\u56e0\u800c\u5c0e\u81f4\u5143\u4ef6\u7684\u6548\u80fd\u4e0d\u4f73\u3002<\/p>\n<p>\u70ba\u4e86\u5be6\u73fe\u5148\u9032\u7684\u8584\u819c\u61c9\u7528\uff0c\u67d0\u4e9b\u8584\u819c\u9700\u88ab\u7a69\u5b9a\u5316 \u2500 \u800c\u5176\u5b83\u7684\u5247\u9700\u88ab\u5f37\u5316\uff0c\u4ee5\u63d0\u5347\u5143\u4ef6\u6548\u80fd \u2500 \u9019\u4e9b\u9700\u6c42\u90fd\u53ef\u5229\u7528Lam Research\u7684SOLA<sup>\u00ae<\/sup> UVTP \u7cfb\u5217\u7522\u54c1\u6240\u63d0\u4f9b\u7684\u5c08\u7528\u8584\u819c\u6c89\u7a4d\u5f8c\u8655\u7406\u6280\u8853\u4f86\u9054\u6210\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u6b64\u7cfb\u5217\u7522\u54c1\u53ef\u63d0\u4f9b\u5c08\u7528\u7684\u6c89\u7a4d\u5f8c\u8655\u7406\u6280\u8853\uff0c\u4ee5\u63d0\u5347\u5148\u9032\u8584\u819c\u61c9\u7528\u7684\u7269\u7406\u7279\u6027\u3002<\/p>\n","protected":false},"author":31,"featured_media":10797,"parent":0,"menu_order":207,"template":"","meta":{"_acf_changed":false,"_relevanssi_hide_post":"","_relevanssi_hide_content":"","_relevanssi_pin_for_all":"","_relevanssi_pin_keywords":"","_relevanssi_unpin_keywords":"","_relevanssi_related_keywords":"","_relevanssi_related_include_ids":"","_relevanssi_related_exclude_ids":"","_relevanssi_related_no_append":"","_relevanssi_related_not_related":"","_relevanssi_related_posts":"","_relevanssi_noindex_reason":"","footnotes":""},"process":[360],"solution":[327,353],"technology":[250],"class_list":["post-1837","product","type-product","status-publish","has-post-thumbnail","hentry","process-deposition-zh-hant","solution-interconnect-zh-hant","solution-transistor-zh-hant","technology-ultraviolet-thermal-processing-uvtp-zh-hant"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.3 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>SOLA\u7cfb\u5217\u7522\u54c1 - Lam Research<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/\" \/>\n<meta property=\"og:locale\" content=\"zh_TW\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"SOLA\u7cfb\u5217\u7522\u54c1 - Lam Research\" \/>\n<meta property=\"og:description\" content=\"\u6b64\u7cfb\u5217\u7522\u54c1\u53ef\u63d0\u4f9b\u5c08\u7528\u7684\u6c89\u7a4d\u5f8c\u8655\u7406\u6280\u8853\uff0c\u4ee5\u63d0\u5347\u5148\u9032\u8584\u819c\u61c9\u7528\u7684\u7269\u7406\u7279\u6027\u3002\" \/>\n<meta property=\"og:url\" content=\"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/\" \/>\n<meta property=\"og:site_name\" content=\"Lam Research\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/LamResearchCorporation\" \/>\n<meta property=\"article:modified_time\" content=\"2021-03-25T00:20:56+00:00\" \/>\n<meta property=\"og:image\" content=\"http:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/SOLA_Products_1920x600.jpg\" \/>\n\t<meta property=\"og:image:width\" content=\"1920\" \/>\n\t<meta property=\"og:image:height\" content=\"600\" \/>\n\t<meta property=\"og:image:type\" content=\"image\/jpeg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:site\" content=\"@lamresearch\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/product\\\/sola-product-family\\\/\",\"url\":\"http:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/product\\\/sola-product-family\\\/\",\"name\":\"SOLA\u7cfb\u5217\u7522\u54c1 - Lam Research\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/product\\\/sola-product-family\\\/#primaryimage\"},\"image\":{\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/product\\\/sola-product-family\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2017\\\/09\\\/SOLA_Products_1920x600.jpg\",\"datePublished\":\"2017-09-07T20:57:15+00:00\",\"dateModified\":\"2021-03-25T00:20:56+00:00\",\"breadcrumb\":{\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/product\\\/sola-product-family\\\/#breadcrumb\"},\"inLanguage\":\"zh-TW\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"http:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/product\\\/sola-product-family\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-TW\",\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/product\\\/sola-product-family\\\/#primaryimage\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2017\\\/09\\\/SOLA_Products_1920x600.jpg\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2017\\\/09\\\/SOLA_Products_1920x600.jpg\",\"width\":1920,\"height\":600},{\"@type\":\"BreadcrumbList\",\"@id\":\"http:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/product\\\/sola-product-family\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"Home\",\"item\":\"http:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"Products\",\"item\":\"https:\\\/\\\/www.lamresearch.com\\\/zh-hant\\\/lam_products\\\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"SOLA\u7cfb\u5217\u7522\u54c1\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#website\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"name\":\"Lam Research\",\"description\":\"Engineering At The Atomic Scale\",\"publisher\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/www.lamresearch.com\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"zh-TW\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#organization\",\"name\":\"Lam Research\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"zh-TW\",\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"contentUrl\":\"https:\\\/\\\/www.lamresearch.com\\\/wp-content\\\/uploads\\\/2021\\\/07\\\/lam_research_logo_corporate.png\",\"width\":188,\"height\":30,\"caption\":\"Lam Research\"},\"image\":{\"@id\":\"https:\\\/\\\/www.lamresearch.com\\\/#\\\/schema\\\/logo\\\/image\\\/\"},\"sameAs\":[\"https:\\\/\\\/www.facebook.com\\\/LamResearchCorporation\",\"https:\\\/\\\/x.com\\\/lamresearch\",\"https:\\\/\\\/www.instagram.com\\\/lam_research\\\/\",\"http:\\\/\\\/www.linkedin.com\\\/company\\\/lam-research\",\"http:\\\/\\\/www.youtube.com\\\/user\\\/LamResearchCorp\"]}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"SOLA\u7cfb\u5217\u7522\u54c1 - Lam Research","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/","og_locale":"zh_TW","og_type":"article","og_title":"SOLA\u7cfb\u5217\u7522\u54c1 - Lam Research","og_description":"\u6b64\u7cfb\u5217\u7522\u54c1\u53ef\u63d0\u4f9b\u5c08\u7528\u7684\u6c89\u7a4d\u5f8c\u8655\u7406\u6280\u8853\uff0c\u4ee5\u63d0\u5347\u5148\u9032\u8584\u819c\u61c9\u7528\u7684\u7269\u7406\u7279\u6027\u3002","og_url":"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/","og_site_name":"Lam Research","article_publisher":"https:\/\/www.facebook.com\/LamResearchCorporation","article_modified_time":"2021-03-25T00:20:56+00:00","og_image":[{"width":1920,"height":600,"url":"http:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/SOLA_Products_1920x600.jpg","type":"image\/jpeg"}],"twitter_card":"summary_large_image","twitter_site":"@lamresearch","schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/","url":"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/","name":"SOLA\u7cfb\u5217\u7522\u54c1 - Lam Research","isPartOf":{"@id":"https:\/\/www.lamresearch.com\/#website"},"primaryImageOfPage":{"@id":"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/#primaryimage"},"image":{"@id":"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/#primaryimage"},"thumbnailUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/SOLA_Products_1920x600.jpg","datePublished":"2017-09-07T20:57:15+00:00","dateModified":"2021-03-25T00:20:56+00:00","breadcrumb":{"@id":"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/#breadcrumb"},"inLanguage":"zh-TW","potentialAction":[{"@type":"ReadAction","target":["http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/"]}]},{"@type":"ImageObject","inLanguage":"zh-TW","@id":"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/#primaryimage","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/SOLA_Products_1920x600.jpg","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/SOLA_Products_1920x600.jpg","width":1920,"height":600},{"@type":"BreadcrumbList","@id":"http:\/\/www.lamresearch.com\/zh-hant\/product\/sola-product-family\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"Home","item":"http:\/\/www.lamresearch.com\/zh-hant\/"},{"@type":"ListItem","position":2,"name":"Products","item":"https:\/\/www.lamresearch.com\/zh-hant\/lam_products\/"},{"@type":"ListItem","position":3,"name":"SOLA\u7cfb\u5217\u7522\u54c1"}]},{"@type":"WebSite","@id":"https:\/\/www.lamresearch.com\/#website","url":"https:\/\/www.lamresearch.com\/","name":"Lam Research","description":"Engineering At The Atomic Scale","publisher":{"@id":"https:\/\/www.lamresearch.com\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.lamresearch.com\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"zh-TW"},{"@type":"Organization","@id":"https:\/\/www.lamresearch.com\/#organization","name":"Lam Research","url":"https:\/\/www.lamresearch.com\/","logo":{"@type":"ImageObject","inLanguage":"zh-TW","@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/","url":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","contentUrl":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2021\/07\/lam_research_logo_corporate.png","width":188,"height":30,"caption":"Lam Research"},"image":{"@id":"https:\/\/www.lamresearch.com\/#\/schema\/logo\/image\/"},"sameAs":["https:\/\/www.facebook.com\/LamResearchCorporation","https:\/\/x.com\/lamresearch","https:\/\/www.instagram.com\/lam_research\/","http:\/\/www.linkedin.com\/company\/lam-research","http:\/\/www.youtube.com\/user\/LamResearchCorp"]}]}},"process_terms":[{"term_id":360,"name":"\u6c89\u7a4d","slug":"deposition-zh-hant","taxonomy":"process","parent":0,"order":0}],"solution_terms":[{"term_id":327,"name":"\u4e92\u9023","slug":"interconnect-zh-hant","taxonomy":"solution","parent":0,"order":0},{"term_id":353,"name":"\u96fb\u6676\u9ad4","slug":"transistor-zh-hant","taxonomy":"solution","parent":0,"order":0}],"technology_terms":[{"term_id":250,"name":"Ultraviolet Thermal Processing (UVTP)","slug":"ultraviolet-thermal-processing-uvtp-zh-hant","taxonomy":"technology","parent":0,"order":0}],"industry_challenges":"<p>\u96a8\u8457\u5148\u9032\u534a\u5c0e\u9ad4\u88fd\u9020\u6280\u8853\u63a1\u7528\u65b0\u7684\u4ecb\u96fb\u5c64\u8584\u819c\u4f86\u63d0\u5347\u5143\u4ef6\u6548\u80fd\uff0c\u696d\u754c\u9700\u8981\u5275\u65b0\u6280\u8853\u4f86\u78ba\u4fdd\u8584\u819c\u7684\u5b8c\u6574\u6027\u3002\u5177\u4f4e\u4ecb\u96fb\u503c(k)\u7684\u7d55\u7de3\u8584\u819c\u662f\u534a\u5c0e\u9ad4\u6301\u7e8c\u5fae\u7e2e\u7684\u95dc\u9375\u3002\u7136\u800c\uff0c\u9ad8\u542b\u78b3\u91cf\u548c\u5177\u591a\u5b54\u6027(porosity)\u7684\u4f4e\u4ecb\u96fb\u503c\u8584\u819c\u975e\u5e38\u8106\u5f31\uff0c\u4e14\u5bb9\u6613\u53d7\u640d\u3002\u6b64\u5916\uff0c\u50cf\u662f\u8755\u523b\u3001\u5149\u963b\u53bb\u9664\u3001\u4ee5\u53ca\u6fd5\u5f0f\u6e05\u6d17\u7b49\u88fd\u7a0b\u6b65\u9a5f\u90fd\u6703\u640d\u58de\u4f4e\u4ecb\u96fb\u503c\u6750\u6599\uff0c\u4e26\u53ef\u80fd\u7531\u65bc\u904e\u7a0b\u4e2d\u7684\u542b\u78b3\u91cf\u640d\u5931\u6216\u5438\u9644\u6c34\u5206\u800c\u4f7f\u6709\u6548k\u503c\u589e\u52a0\u3002\u56e0\u6b64\uff0c\u9700\u5229\u7528\u5275\u65b0\u7684\u7d2b\u5916\u7dda\u71b1\u8655\u7406(UVTP)\u6280\u8853\u4f86\u5f37\u5316\u8584\u819c\u7684\u6a5f\u68b0\u5f37\u5ea6\u3001\u53bb\u9664\u6703\u7522\u751f\u5b54\u9699\u7684\u524d\u9a45\u9ad4 (porogens)\uff0c\u4ee5\u78ba\u4fdd\u4f4e\u4ecb\u96fb\u503c\u8584\u819c\u7684\u5b8c\u6574\u6027\u3002UVTP\u9084\u80fd\u7528\u4f86\u589e\u52a0\u524d\u6bb5\u88fd\u7a0b(FEOL)\u6c2e\u5316\u77fd\u8584\u819c\u7684\u61c9\u8b8a\uff0c\u4ee5\u5f37\u5316\u5143\u4ef6\u6548\u80fd\u3002<\/p>\n","key_benefits":["\u696d\u754c\u6700\u4f73\u7684\u8584\u819c\u7279\u6027\u3001\u55ae\u7247\u6676\u5713\u8207\u591a\u7247\u6676\u5713\u5747\u52fb\u5ea6\uff0c\u4ee5\u53ca\u751f\u7522\u529b","\u900f\u904e\u5c08\u5c6c\u7684\u8655\u7406\u88fd\u7a0b(\u66b4\u9732\u65bc\u7d2b\u5916\u7dda\u3001\u6c23\u9ad4\u3001\u84b8\u6c23\u548c\u71b1\u4e4b\u4e0b)\uff0c\u53ef\u63d0\u5347\u5148\u524d\u5df2\u6c89\u7a4d\u8584\u819c\u7684\u7269\u7406\u7279\u6027","\u900f\u904e\u591a\u7ad9\u5e8f\u5217\u5f0f\u8655\u7406(MSSP)\u67b6\u69cb\uff0c\u53ef\u5728\u6676\u5713\u88fd\u7a0b\u7684\u5404\u7ad9\u9ede\u7368\u7acb\u63a7\u5236\u6eab\u5ea6\u3001\u6ce2\u9577\u548c\u653e\u5c04\u5f37\u5ea6(intensity)\uff0c\u4ee5\u4fdd\u6301\u88fd\u7a0b\u7684\u9748\u6d3b\u6027"],"product_offerings":["SOLA<sup>\u00ae<\/sup> Excel"],"key_applications":["\u4f4e\u4ecb\u96fb\u503c(low-k)\u8584\u819c\u8655\u7406","\u61c9\u8b8a(strained)\u6c2e\u5316\u77fd\u8584\u819c\u8655\u7406"],"featured_media_src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/SOLA_Products_1920x600.jpg","drawer_background_image":{"id":10797,"src":"https:\/\/www.lamresearch.com\/wp-content\/uploads\/2017\/09\/SOLA_Products_1920x600.jpg"},"_links":{"self":[{"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/product\/1837","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/types\/product"}],"author":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/users\/31"}],"version-history":[{"count":0,"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/product\/1837\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/media\/10797"}],"wp:attachment":[{"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/media?parent=1837"}],"wp:term":[{"taxonomy":"process","embeddable":true,"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/process?post=1837"},{"taxonomy":"solution","embeddable":true,"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/solution?post=1837"},{"taxonomy":"technology","embeddable":true,"href":"https:\/\/www.lamresearch.com\/zh-hant\/wp-json\/wp\/v2\/technology?post=1837"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}