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ALD","\u96fb\u5bb9\u5f0f\u8026\u5408\u96fb\u6f3f\uff08CCP\uff09\u548c\u9060\u7aef\u96fb\u6f3f\u9810\u8655\u7406\u9078\u9805","\u9748\u6d3b\u7684\u5e73\u53f0\u914d\u7f6e","\u696d\u754c\u6a19\u7aff\u7684\u93a2\u8584\u819c\u88fd\u7a0b\u751f\u7522\u529b\n","\u5229\u7528\u79d1\u6797\u7814\u767c\u7684\u8108\u885d\u5f0f\u6210\u6838\u5c64(pulsed nucleation layer\uff0cPNL\uff09\u539f\u5b50\u5c64\u6c89\u7a4d\uff08ALD\uff09\u88fd\u7a0b\u7522\u751f\u6210\u6838\u5c64\uff08nucleation layer\uff09\uff0c\u4e26\u4ee5\u5c08\u5229\u7684\u591a\u7ad9\u5e8f\u5217\u5f0f\u6c89\u7a4d\u88fd\u7a0b\uff08MSSD\uff09\u67b6\u69cb\u5be6\u73fe\u73fe\u5834\u7684\uff08in-situ\uff09\u4e3b\u584a\u9ad4CVD\u586b\u5145\u88fd\u7a0b\n","\u5229\u7528ALD\u88fd\u7a0b\u4f86\u6e1b\u5c11\u539a\u5ea6\uff0c\u4ee5\u964d\u4f4e\u8f03\u8584\u7684\u93a2\u8584\u819c\u6574\u9ad4\u96fb\u963b\u7387\uff0c\u4e26\u6539\u8b8a\u4ee5CVD\u88fd\u7a0b\u7684\u4e3b\u584a\u9ad4\u586b\u5145\u7684\u6676\u683c\u751f\u9577\u65b9\u5f0f\n","\u5148\u90323D 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