Fabtex™ Yield Optimizer is a cutting-edge software platform designed to help semiconductor foundries accelerate yield ramp and improve high-volume manufacturing performance.
该产品系列广泛应用于大马士革工艺上,提供精密的金属铜电镀。
SEMulator3D® is a semiconductor process modeling platform that offers wide ranging technology development capabilities.
使用先进的ALD技术,这些产品提供纳米级尺寸下器件关键工艺所需的介电薄膜。
对于深刻蚀应用,此产品系列提供了关键高纵横比特征所需的卓越的跨晶片均匀性控制。
Lam的PECVD产品系列为广泛的器件应用提供了高生产率的精密介电薄膜沉积。