Technology: Atomic Layer Etch (ALE)

FLEX系列產品

Atomic Layer Etch (ALE) Reactive Ion Etch

Lam Research的介電層蝕刻系統具備應用導向功能，可用來建構先進元件中的各種高難度結構。

Advanced Memory, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Optoelectronics & Photonics, Packaging, Patterning, Transistor

SENSE.I系列產品

Atomic Layer Etch (ALE) Deep Reactive Ion Etch (DRIE) DRIE

採用緊湊、高密度的結構設計，Lam Research突破性的Sense.i™平台具備無與倫比的系統智慧，能以最高生產力實現製程效能。

Advanced Memory, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Optoelectronics & Photonics, Packaging, Patterning, Sensors & Transducers, Transistor