Mass Metrology | Products | Lam Research

質量測量產品

提供精密的測量來洞察製程

質量測量技術可測量晶圓在沉積、蝕刻和清洗製程之後的質量變化,以便能夠監測和控制這些經常重複的核心製造步驟。對於薄膜堆疊,高深寬比結構和複雜3D架構等設計,光學技術在精確測量厚、深或視覺上模糊的特徵結構方面的能力有限。測量這些應用的質量變化提供了一種直接的高精度解決方案,可用來監測和控制先進元件結構中的關鍵特徵,而這些特徵通常是不容許有任何變異的。

Lam Research的高精度質量測量系統提供沉積、蝕刻和清洗步驟的即時線上監測和控制 ─ 記錄質量的微小變化,以對潛在的製程偏差實現先進的檢測。


質量測量

產品

METRYX系列產品

Mass Metrology

Lam Research的質量測量系統可為3D 元件結構的先進製程監控提供次毫克級(sub-milligram)的質量測量能力。

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