精确测量，洞察工艺
质量计量技术用于测量质量在沉积、刻蚀和清洗工艺实施之后的变化，从而对这些经常被重复的核心制造步骤实施监测和控制。对于薄膜堆栈、高深宽比结构、复杂的3D架构等设计组件，光学技术能力有限，难以准确测量较厚、较深或非透明的构件。测量这些应用中的质量变化是一种简单直接的高精度解决方案，可以用于监测和控制偏差容忍度极低的先进器件结构中的关键构件。
泛林集团的高精度质量计量系统系列可以实时在线监测和控制沉积、刻蚀和清洗步骤——记录质量的微小变化，对潜在的工艺流程偏差进行先进检测。
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