彙整: Products
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Triton 產品系列
Triton 平台是用於單晶圓電鍍和濕式製程的多功能模組化解決方案。
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Phoenix 產品系列
Phoenix 可為 510×515 公釐基板提供全自動大量面板製程。
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Kallisto 產品系列
先進的立式製程平台，用於對 300×300 公釐 至 5.1 代（1100×1300 公釐）的基板進行濕式化學處理，以滿足半導體產業的需求。
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Semiverse™ Solutions
Our semiconductor process modeling software, SEMulator3D®, performs predictive modeling of etch, deposition & other integrated processes, to identify problems prior to fabrication. VizGlow™ is a simulation platform for high-fidelity modeling of non-equilibrium plasma discharges.
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OverViz
OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.
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SEMulator3D
SEMulator3D® is a semiconductor process modeling platform that offers wide ranging technology development capabilities.
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Pulsus Product Family
Our Pulsus product family provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications.
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Coventor Product Family
Our semiconductor process modeling software (SEMulator3D) and plasma modeling software (OverViz) perform predictive modeling of etch, deposition, plasma & other processes, to identify problems prior to fabrication.
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選擇性蝕刻産品系列
突破性的産品組合可提供埃米等級的精密度和超高選擇性、等向性材料的去除能力，以滿足3D結構和先進邏輯晶片與晶圓製造應用需求。
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VANTEX系列產品
專為Sense.i平台所設計，Vantex透過技術創新和Equipment Intelligence 重新定義了高深寬比蝕刻。