归档： Products
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Triton 产品系列
Triton 平台是用于单晶圆电镀和湿法工艺的多功能模块化解决方案。
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Phoenix 产品系列
Phoenix 可为 510×515 毫米的基板提供全自动大批量面板加工。
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Kallisto 产品系列
先进的立式加工平台，用于对 300×300 毫米 至 5.1 代（1100×1300 毫米）的基板进行湿法化学制备，以满足半工业的需求。
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Semiverse™ Solutions
Our semiconductor process modeling software, SEMulator3D®, performs predictive modeling of etch, deposition & other integrated processes, to identify problems prior to fabrication. VizGlow™ is a simulation platform for high-fidelity modeling of non-equilibrium plasma discharges.
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OverViz
OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.
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SEMulator3D
SEMulator3D® is a semiconductor process modeling platform that offers wide ranging technology development capabilities.
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Pulsus Product Family
Our Pulsus product family provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications.
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Coventor Product Family
Our semiconductor process modeling software (SEMulator3D) and plasma modeling software (OverViz) perform predictive modeling of etch, deposition, plasma & other processes, to identify problems prior to fabrication.
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选择性刻蚀产品系列
突破性产品组合以埃米级精度和超高选择性为 3D 架构和先进逻辑和晶圆代工应用提供各向同性的材料去除。
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Vantex产品系列
Vantex专为Sense.i平台设计，通过技术和Equipment Intelligence（设备智能）的创新，重新定义高深宽比刻蚀。