Products Archive - Lam Research

Archives: Products

  • Phoenix Product Family

    Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

  • Kallisto Product Family

    An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.

  • Triton Product Family

    The Triton platform is a versatile and modular solution for single wafer plating and wet processing.

  • Semiverse™ Solutions

    Our semiconductor process modeling software, SEMulator3D®, performs predictive modeling of etch, deposition & other integrated processes, to identify problems prior to fabrication. VizGlow™ is a simulation platform for high-fidelity modeling of non-equilibrium plasma discharges.

  • OverViz

    OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.

  • SEMulator3D

    SEMulator3D® is a semiconductor process modeling platform that offers wide ranging technology development capabilities.

  • Pulsus Product Family

    Our Pulsus product family provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications.

  • Coventor Product Family

    Our semiconductor process modeling software (SEMulator3D) and plasma modeling software (OverViz) perform predictive modeling of etch, deposition, plasma & other processes, to identify problems prior to fabrication.

  • Selective Etch Product Family

    Breakthrough portfolio delivers isotropic material removal with angstrom-scale precision and ultra-high selectivity capabilities for 3D architectures and advanced logic and foundry applications.

  • Vantex Product Family

    Designed for the Sense.i platform, Vantex redefines high aspect ratio etching with innovations in technology and Equipment Intelligence.