Archives: Products
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Coventor Product Family
Our semiconductor process modeling software (SEMulator3D) performs predictive modeling of etch, deposition & other processes, to identify problems prior to fabrication.
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Selective Etch Product Family
Breakthrough portfolio delivers isotropic material removal with angstrom-scale precision and ultra-high selectivity capabilities for 3D architectures and advanced logic and foundry applications.
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Vantex Product Family
Designed for the Sense.i platform, Vantex redefines high aspect ratio etching with innovations in technology and Equipment Intelligence.
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Sense.i Product Family
Our latest etch platform offers unparalleled system intelligence in a compact, high-density architecture to deliver process performance at the highest productivity.
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Reliant Deposition Products
The refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for dielectric film applications.
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Reliant Clean Products
Our refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for a range of frontside and backside/bevel cleans.
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Reliant Etch Products
The refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for conductor, dielectric, and metal etch applications.
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DSiE Product Family
These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.
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Metryx Product Family
Our mass metrology systems deliver sub-milligram measurement capability for advanced process monitoring and control of three-dimensional device structures.
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Coronus Product Family
These bevel clean systems remove unwanted materials from the wafer’s edge while protecting the active die area to enhance die yield.