Products Archive - Lam Research
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Archives: Products

  • Phoenix Product Family

    Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

  • Kallisto Product Family

    An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.

  • Galaxy Product Family

    The Galaxy platform combines years of experience in batch wafer processing with advanced process control typically only found on single wafer tools.

  • Triton Product Family

    The Triton platform is a versatile and modular solution for single wafer plating and wet processing.

  • Semiverse™ Solutions

    Our semiconductor process modeling software, SEMulator3D®, performs predictive modeling of etch, deposition & other integrated processes, to identify problems prior to fabrication. VizGlow™ is a simulation platform for high-fidelity modeling of non-equilibrium plasma discharges.

  • OverViz

    OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.

  • SEMulator3D

    SEMulator3D® is a semiconductor process modeling platform that offers wide ranging technology development capabilities.

  • Pulsus Product Family

    Our Pulsus product family provides thin film deposition solutions for a wide range of complex multi-compound materials for Specialty Technologies applications.

  • Coventor Product Family

    Our semiconductor process modeling software (SEMulator3D) performs predictive modeling of etch, deposition & other processes, to identify problems prior to fabrication.

  • Selective Etch Product Family

    Breakthrough portfolio delivers isotropic material removal with angstrom-scale precision and ultra-high selectivity capabilities for 3D architectures and advanced logic and foundry applications.

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