Archives: Products
-
Phoenix Product Family
Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.
-
Kallisto Product Family
An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.
-
Galaxy Product Family
The Galaxy platform combines years of experience in batch wafer processing with advanced process control typically only found on single wafer tools.
-
Triton Product Family
The Triton platform is a versatile and modular solution for single wafer plating and wet processing.
-
Semiverse™ Solutions
Our semiconductor process modeling software, SEMulator3D®, performs predictive modeling of etch, deposition & other integrated processes, to identify problems prior to fabrication. VizGlow™ is a simulation platform for high-fidelity modeling of non-equilibrium plasma discharges.
-
OverViz
OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.
-
SEMulator3D
SEMulator3D® is a semiconductor process modeling platform that offers wide ranging technology development capabilities.
-
Pulsus Product Family
Our Pulsus product family provides thin film deposition solutions for a wide range of complex multi-compound materials for Specialty Technologies applications.
-
Coventor Product Family
Our semiconductor process modeling software (SEMulator3D) performs predictive modeling of etch, deposition & other processes, to identify problems prior to fabrication.
-
Selective Etch Product Family
Breakthrough portfolio delivers isotropic material removal with angstrom-scale precision and ultra-high selectivity capabilities for 3D architectures and advanced logic and foundry applications.