Archives: Products
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Akara®
Designed for high-volume production with maximum process yield, Akara® increases wafer output and eliminates wasted time, with millisecond response times to any change. The industry’s most advanced etch uniformity controls provide angstrom-level critical dimension uniformity and wafer to wafer repeatability.
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Dextro™
Dextro is a mobile unit with a robotic arm and uses various end-effectors as hands to manage critical equipment maintenance tasks that are time-consuming and prone to errors when done manually. Operated by a fab technician or engineer, Dextro executes complex maintenance tasks with precision and repeatability that are beyond human capability alone, enabling higher Read more…
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Phoenix Product Family
Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.
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Kallisto Product Family
An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.
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Triton Product Family
The Triton platform is a versatile and modular solution for single wafer plating and wet processing.
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Semiverse™ Solutions
Our semiconductor process modeling software, SEMulator3D®, performs predictive modeling of etch, deposition & other integrated processes, to identify problems prior to fabrication. VizGlow™ is a simulation platform for high-fidelity modeling of non-equilibrium plasma discharges.
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OverViz
OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.
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SEMulator3D
SEMulator3D® is a semiconductor process modeling platform that offers wide ranging technology development capabilities.
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Prestis™
Our Prestis™ product provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications.
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Coventor Product Family
Our semiconductor process modeling software (SEMulator3D) and plasma modeling software (OverViz) perform predictive modeling of etch, deposition, plasma & other processes, to identify problems prior to fabrication.