Archives: Products

  • Coventor Product Family

    Our semiconductor process modeling software (SEMulator3D) performs predictive modeling of etch, deposition & other processes, to identify problems prior to fabrication.

  • Selective Etch Product Family

    Breakthrough portfolio delivers isotropic material removal with angstrom-scale precision and ultra-high selectivity capabilities for 3D architectures and advanced logic and foundry applications.

  • Vantex Product Family

    Designed for the Sense.i platform, Vantex redefines high aspect ratio etching with innovations in technology and Equipment Intelligence.

  • Sense.i Product Family

    Our latest etch platform offers unparalleled system intelligence in a compact, high-density architecture to deliver process performance at the highest productivity.

  • Reliant Deposition Products

    The refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for dielectric film applications.

  • Reliant Clean Products

    Our refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for a range of frontside and backside/bevel cleans.

  • Reliant Etch Products

    The refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for conductor, dielectric, and metal etch applications.

  • DSiE Product Family

    These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.

  • Metryx Product Family

    Our mass metrology systems deliver sub-milligram measurement capability for advanced process monitoring and control of three-dimensional device structures.

  • Coronus Product Family

    These bevel clean systems remove unwanted materials from the wafer’s edge while protecting the active die area to enhance die yield.

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