Reliant Systems

Lam’s Reliant® products provide etch, deposition and clean solutions for a wide range of applications such as those addressing the Specialty Technologies market and for nodes ≥14 nm for conventional CMOS.

For Specialty Technologies, we are enabling customer roadmaps by developing new solutions, including critical steps. Specialty Technologies is a growing market, covering devices such as power, CMOS image sensors (CIS), radio frequency (RF), optoelectronic, analog and mixed-signal, and micro-electromechanical systems (MEMS). We also extend the productive life of some of these fabs by developing 200 mm solutions when needed, leveraging on established 300 mm technology.

For nodes ≥14 nm for conventional CMOS, there is a need to either expand existing capacity or build new fabs. We bring continuity and speed to solution by delivering proven solutions.