Reliant Systems

Increasing production capacity with maximum value

For applications with larger geometries that still benefit from Lam’s process control and precision, such as those addressing the ≥28 nm and the Specialty Technology market, our performance-proven non-leading edge products allow for capacity expansions. Our capability to build new and refurbished tools at 200 mm and 300 mm allows you to extend the productive life of your fab.


Purchasing through an original equipment manufacturer (OEM) like Lam Research minimizes the risks of unexpected costs and unpredictable time to production that are typically associated with used systems purchases.

Lam’s Reliant® products meet semiconductor manufacturers’ needs for high-performance, maximum-predictability, and low-risk equipment by providing production-proven and newly-built products. Systems are built and installed production-ready and on schedule by Lam-certified personnel to original specifications using OEM-certified parts to ensure the highest-quality products and reliable performance. This thorough approach includes the same testing protocols that are used on new products. Parts and labor, provided by a dedicated local support team, are available. Software licenses are also available, and system performance is guaranteed.

Reliant systems

Reliant Clean Products

Reliant Systems Wet Clean/Strip/Etch

Our refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for a range of frontside and backside/bevel cleans.

Reliant Deposition Products

Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Reliant Systems

The refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for dielectric film applications.

Reliant Etch Products

Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE) Reliant Systems

The refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for conductor, dielectric, and metal etch applications.

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