Enabling roadmaps for Specialty Technologies and extending the productive life of fabs
Lam’s Reliant® products provide etch, deposition and clean solutions for a wide range of applications such as those addressing the Specialty Technologies market and for nodes ≥14 nm for conventional CMOS.
For Specialty Technologies, we are enabling customer roadmaps by developing new solutions, including critical steps. Specialty Technologies is a growing market, covering devices such as power, CMOS image sensors (CIS), radio frequency (RF), optoelectronic, analog and mixed-signal, and micro-electromechanical systems (MEMS). We also extend the productive life of some of these fabs by developing 200 mm solutions when needed, leveraging on established 300 mm technology.
For nodes ≥14 nm for conventional CMOS, there is a need to either expand existing capacity or build new fabs. We bring continuity and speed to solution by delivering proven solutions.
Reliant systems
Reliant Clean Products
Reliant Systems Wet Clean/Strip/Etch
Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Deposition Products
Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Pulsed Laser Deposition (PLD) Reliant Systems
Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Etch Products
Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE) Reliant Systems
Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs.