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Discretes & Power Devices
DSiE Product Family
These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.
DV-Prime & Da Vinci Product Families
These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.
Flex Product Family
Our dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.
Kallisto Product Family
An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.
Kiyo Product Family
These market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.
Metior Product Family
Our mass metrology systems deliver sub-milligram measurement capability for advanced process monitoring and control of three-dimensional device structures.
OverViz
OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.
Phoenix Product Family
Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.
Reliant Clean Products
Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Deposition Products
Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Etch Products
Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
SP Series Product Family
This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.
SPEED Product Family
These dielectric deposition products provide complete gapfill of high aspect ratio spaces with industry-leading throughput and reliability.
Triton Product Family
The Triton platform is a versatile and modular solution for single wafer plating and wet processing.
VECTOR Product Family
Our PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.
Versys Metal Product Family
These metal etch products provide excellent process control at high-productivity for electrical connection and metal hardmask applications.
Related Blog Posts
Advanced Packaging Furthers 3D Semi Structures and Extends Moore’s Law
New developments in semiconductor packaging are contributing to the quest to extend Moore’s Law, the predictive model of adding more transistors to a semiconductor. One promising development is advanced packaging, which can better manage the power consumption of a collection of chips while shrinking their total size.
Heterogeneous Integration Sets Up an Inflection in Panel Processing Equipment (Drivers)
The accelerating costs of transistor scaling are pushing the industry to find innovative ways to improve chip and system performance from generation to generation. That’s why heterogenous integration (HI) has become the latest inflection in packaging technology.