Our Solutions
Optoelectronics & Photonics
DSiE Product Family
These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.
DV-Prime & Da Vinci Product Families
These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.
Fabtex™ Yield Optimizer
Fabtex™ Yield Optimizer is a cutting-edge software platform designed to help semiconductor foundries accelerate yield ramp and improve high-volume manufacturing performance.
Flex Product Family
Our dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.
Kallisto Product Family
An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.
OverViz
OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.
Phoenix Product Family
Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.
Reliant Clean Products
Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Deposition Products
Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Etch Products
Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
SEMulator3D
SEMulator3D® is a semiconductor process modeling platform that offers wide ranging technology development capabilities.
SP Series Product Family
This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.
SPEED Product Family
These dielectric deposition products provide complete gapfill of high aspect ratio spaces with industry-leading throughput and reliability.
Triton Product Family
The Triton platform is a versatile and modular solution for single wafer plating and wet processing.
VECTOR Product Family
Our PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.
Related Blog Posts
How Etch Is Evolving to Meet the Demands of the AI Era
The rise of artificial intelligence (AI) has placed significant demands on semiconductor performance, particularly in the realm of etching technology. AI requires massive amounts of data for training, necessitating high levels of parallel processing, non-volatile memory, and fast data transfer rates.
And the Edison Award Goes to... Argos, Prevos, and Selis!
Lam Research has won a prestigious Edison Award for best new products in materials science. The bronze medal was awarded for our recently launched innovative suite of selective etch products designed to accelerate chipmakers’ 3D roadmaps.