Spares | Customer Support | Lam Research


Providing OEM parts for every fab requirement

Our comprehensive portfolio of high quality, cost-effective parts and contracts is designed to balance performance, availability, and cost-effective operation of our equipment.

Lam Research Customer Support Spares

As an original equipment manufacturer (OEM), we use learning from actual equipment data to maximize operational efficiency for our spare parts. Lam’s robust business processes, quality control systems, and strong worldwide supply chain ensure that chipmakers have reliable equipment that delivers predictable and repeatable results.

We deliver high-quality, low-defect OEM parts for high tool performance and fast ramp up.  These process-of-record (POR) parts are released under strict revision control and produced only by Lam qualified vendors, leading to a high level of part-to-part consistency.

For certain classes of non-consumable parts, options to repair or refurbish exist.  These parts are tested to the same specifications as new parts, lowering cost of ownership while delivering the same performance as new.

Higher-performance parts are also available, incorporating advanced materials and manufacturing, improved defectivity, and longer life. Re-engineered parts with relaxed tolerances in critical dimensions or local sourcing can deliver lower cost of ownership.

In addition, we enable continued operation of non-leading-edge tools with cost reduction and obsolescence solutions, including last-time buys and engineering of replacement parts.

Customers are supported by our global infrastructure with world-class inventory planning, ordering systems, and technical capabilities. Distribution centers are strategically positioned around the world to ensure prompt parts delivery.

A wide range of parts availability and management options are available. For specific information, please visit MyLam® or contact your local Lam Research representative.