Sustainable Product Innovation - Lam Research

Sustainable Product Innovation

Together with our customers, we’re building value through sustainable product innovation.

Microchips are getting smaller, more advanced, and more broadly used. We rely on them for our smartphones, our computers, and lifesaving medical equipment. They also power renewable energy solutions—such as electric vehicles, wind turbines, and solar panel systems—that are critical for reducing global emissions.

Lam’s market-leading portfolio enables these technologies by helping to bring our customers’ big ideas to life. Now, we’re advancing the future of semiconductor innovation by targeting products that are more efficient, longer lasting, and more sustainable.

We’re fueling sustainable product innovation by:


  • Investing
    significantly in R&D to improve efficiency and reduce emissions
  • Collaborating closely
    with customers, universities, and other stakeholders
  • Supporting programs
    and initiatives designed to inspire experimentation and collaboration
  • Collecting baseline
    data on our products’ environmental impact and designing with the planet in mind
  • Investing in product
    refurbishment and reuse programs
  • Living our Core
    Values of agility, teamwork, and innovation & continuous improvement

Unleashing the power of innovation for a better world

What we do

Lam products and services are a catalyst for progress. We enable:

  • Computers and phones
    that connect us
  • Electric vehicles that support
    the transition to cleaner,
    renewable energy sources
  • Smart cities that
    operate efficiently and
    improve quality of life
  • Critical medical devices
    and technologies that
    save lives
  • Energy efficient cloud
    computing servers

How we do it

Our vast range of products and solutions include:


  • Metal Films
  • Dielectric Films
  • Film Treatment

Strip & Clean

  • Wet Clean
  • Dry Plasma Clean

Customer Support

  • Service
  • Spares
  • Upgrades
  • Reliant Systems™
  • Training


  • Conductor Etch
  • Dielectric Etch
  • Through-Silicon
    Via (TSV) Etch
  • Selective Etch

Advanced Equipment and Process Control

  • Mass Metrology
  • Integration Modeling Software


Product efficiency and circularity

Product efficiency and sustainability go hand in hand

At Lam, we’re proving that it’s possible to maximize productivity while minimizing the use of raw materials, energy, and space. We’re optimizing our products and processes to be smarter and more efficient, in line with our company and customers’ business and sustainability goals.

These initiatives are critical to our net zero journey, as the largest portion of Lam’s emissions are generated through product use. Beyond building value for our customers through long-lasting, efficient product solutions, we’re engaging them to set and pursue science-based targets. Our approach includes:


focus areas


We’re making our tools and processes more energy efficient to drive reductions in energy usage, greenhouse gas (GHG) emissions, and costs.


In our labs, our teams have installed Equipment Intelligence® ECO sensors to capture data on the environmental performance of our tools.


We’re identifying and leveraging opportunities to shift away from high global warming potential (GWP) chemistries to improve both air quality and climate health.


Creating products that go further

Lam provides high-quality, low-defect consumable, and nonconsumable spare parts designed to increase circularity while balancing performance, availability, and cost. Our spares offerings leverage services including re-cleaning, repair, refurbishment, and re-coating. This enables the reuse of electrostatic chucks, radio frequency (RF) hardware, showerheads, and other high-value spare parts. By reusing these parts, we build added value into our products and reduce the environmental impacts of manufacturing new tools.


strategy for
meeting our
holistic needs

  • Customized service and software solutions
    that enhance productivity throughout the product lifecycle
  • High-quality, low-defect consumable and non-consumable spare parts designed
    to increase circularity while balancing performance, availability, and cost
  • Technology and productivity upgrades that increase productivity,
    reliability, and efficiency and extend product lifecycle
  • Reliant™ systems, including new and refurbished equipment, that extend
    product lifecycles, increase production capacity, and decrease waste
  • Technical training, including software and hardware courses, to develop
    customers’ knowledge and technical expertise


By tuning in to our customers’ needs, we’re helping them go further


Maintaining our customers’ trust is a top priority as we build sustainability into our products. Our customers are leaders in the semiconductor industry, and we take pride in delivering best-in-class solutions that support their success. Through close collaboration with our customers, we strive to continue to exceed their expectations and develop solutions that anticipate their long-term needs.


Learn more about our products and our approach to customer support:


Product quality & safety

Our focus on product quality and safety is fundamental to everything we do. With oversight from our cross-functional Quality Leadership team, Lam’s product design teams ensure the products and services we provide are safe for their intended use and in compliance with market regulations and standards. We take a systematic approach to continuously improve our products and quickly address any adjustments that need to be made. Lam is also certified under ISO 9001, an international standard that provides a framework for an effective quality management system.

Preventing, reporting, and addressing product safety concerns
As part of our product release process, all new products undergo safety certification testing. We document the results in a product safety report, commonly known as a SEMI S2. Our Logistics team provides safety data sheets for materials such as cleaning fluids and lubricants. Customers can enter into service agreements with Lam to ensure proper product maintenance, and we provide customer training on the safe use of our products, typically over the span of a week-long course.

When issues related to product safety or performance arise, we notify our customer base. We also have systems in place that allow our field-service personnel and customers to report safety issues to Lam. Our Product Safety team assesses these issues to verify the safety concern. If the issue is product-related, the Product Safety team will typically generate a safety problem report to address it. If the issue is behavioral, the Product Safety team will address the matter at the local level.

Promoting safety best practices on a larger scale
We further advance product safety best practices in our industry through collaboration with customers and industry peers. For instance, Lam helps lead the SEMI Equipment Suppliers group to address new product regulations impacting the industry. For more than two decades, Lam has worked with stakeholders to develop, implement, and continually improve the SEMI Environmental Health and Safety (EHS) Guidelines for Semiconductor Manufacturing Equipment. These standards are broadly used across the semiconductor industry and other industries to minimize hazards related to equipment, facilities, and work environments.

Engaging our industry

Together, we can realize new opportunities in semiconductor innovation. Through our office of the chief technology and sustainability officer, we engage leading universities, researchers, and Lam’s global engineering community to collaborate on innovative solutions for the industry’s grand challenges. For instance, through our Seminar Series, we invite internal and external speakers from all areas of the business to share leading-edge work and insights with their peers.

Engaging universities

Universities are a place for deep thinking, collaboration, and breakthrough discoveries. We collaborate with universities and other academic research institutions to accelerate innovation, gain insights into industry challenges, and build relationships that fuel our talent pipeline.

Since 2015, our Unlock Ideas program has supported the testing of novel ideas proposed by Lam’s global technological community and university faculty. Lam provides seed grants to advance the top proposals. These proposals include technologies across software and controls, subsystems, automation and robotics, process and materials, productivity, and sustainability. To compliment the program, we host a University Collaboration Showcase each year, where participants share outcomes from our Unlock Ideas projects and university research collaborations.

Caution regarding forward-looking statements


Statements made on our Company webpage that are not of historical fact are forward-looking statements and are subject to the safe harbor provisions created by the Private Securities Litigation Reform Act of 1995. Such forward-looking statements relate to, but are not limited to: our goal to be net zero by 2050, our ESG strategy and related goals, our renewable electricity goals, our continued commitment to business integrity, the strength and effectiveness of our ethics and compliance framework, our environmental footprint, sustainability in our industry, our social impacts, our inclusion and diversity initiatives, and the sustainability of our products and operations. Some factors that may affect these forward-looking statements include: trade regulations, export controls, trade disputes, and other geopolitical tensions may inhibit our ability to sell our products; business, political and/or regulatory conditions in the consumer electronics industry, the semiconductor industry and the overall economy may deteriorate or change; the actions of our customers and competitors may be inconsistent with our expectations; supply chain cost increases and other inflationary pressures have impacted and may continue to impact our profitability; supply chain disruptions or manufacturing capacity constraints may limit our ability to manufacture and sell our products; and natural and human-caused disasters, disease outbreaks, war, terrorism, political or governmental unrest or instability, or other events beyond our control may impact our operations and revenue in affected areas; as well as the other risks and uncertainties that are described in the documents filed or furnished by us with the Securities and Exchange Commission, including specifically the Risk Factors described in our most recent annual report on Form 10-K and our quarterly report on Form 10-Q. These uncertainties and changes could materially affect the forward-looking statements and cause actual results to vary from expectations in a material way. The Company undertakes no obligation to update any forward-looking statements.