Prestis™

The diverse range of applications in Specialty Technologies requires the processing of emerging materials. One such material is aluminum scandium nitride (AlScN) with high scandium content. With the growth of the 5G market, the need for higher frequency band filters is creating challenges for existing high-volume production technologies. To address these challenging requirements, a very versatile thin film deposition technology is required to enable more advanced device design. Lam’s Prestis™ products enable mass production of ≥ 40% AlScN films.

• RF filters play a critical role in 5G and WiFi 6 performance by increasing the number of users a network can handle while also increasing each user’s speed. The high scandium content of the film improves the RF filter performance by enhancing the mechanical coupling coefficient.
• MEMS microphones are valued for a high signal-to-noise ratio that allows them to capture even muffled sounds accurately — essential for voice control features and noise cancellation in 5G-enabled devices. The high scandium content of the film improves the signal to noise ratio via a combined enhancement of piezo performance (e31,f) and dielectric loss (tan d).