Archives: Products
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Sense.i Product Family
Our latest etch platform offers unparalleled system intelligence in a compact, high-density architecture to deliver process performance at the highest productivity.
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Reliant Deposition Products
Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
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Reliant Clean Products
Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
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Reliant Etch Products
Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
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DSiE Product Family
These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.
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Metior Product Family
Our mass metrology systems deliver sub-milligram measurement capability for advanced process monitoring and control of three-dimensional device structures.
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Coronus Product Family
Coronus systems focus on the bevel edge to enhance overall yield. Semiconductor processing can cause residues and roughness to accumulate along the wafer edge where they may flake off, drift to other areas, and create defects that cause a device to fail. Coronus etch products remove bevel residues and Coronus deposition protect the wafer bevel from damage.
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SP Series Product Family
This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.
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DV-Prime & Da Vinci Product Families
These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.
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EOS Product Family
Our advanced wet clean products deliver exceptionally low on-wafer defectivity at high throughput for progressively demanding applications.