Archives: Products
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SP Series Product Family
This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.
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DV-Prime & Da Vinci Product Families
These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.
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EOS Product Family
Our advanced wet clean products deliver exceptionally low on-wafer defectivity at high throughput for progressively demanding applications.
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GAMMA Product Family
These products provide the process flexibility needed to address a wide range of critical photoresist strip applications.
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Syndion Product Family
For deep etch applications, this product family provides the exceptional across-wafer uniformity control needed for critical high aspect ratio features.
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Flex Product Family
Our dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.
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Versys Metal Product Family
These metal etch products provide excellent process control at high-productivity for electrical connection and metal hardmask applications.
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Kiyo Product Family
These market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.
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SOLA Product Family
This product family offers specialized post-deposition film treatments to improve physical characteristics for advanced film applications.
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SPEED Product Family
These dielectric deposition products provide complete gapfill of high aspect ratio spaces with industry-leading throughput and reliability.