Archives: Products
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GAMMA Product Family
These products provide the process flexibility needed to address a wide range of critical photoresist strip applications.
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Syndion Product Family
For deep etch applications, this product family provides the exceptional across-wafer uniformity control needed for critical high aspect ratio features.
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Flex Product Family
Our dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.
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Versys Metal Product Family
These metal etch products provide excellent process control at high-productivity for electrical connection and metal hardmask applications.
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Kiyo Product Family
These market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.
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SOLA Product Family
This product family offers specialized post-deposition film treatments to improve physical characteristics for advanced film applications.
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SPEED Product Family
These dielectric deposition products provide complete gapfill of high aspect ratio spaces with industry-leading throughput and reliability.
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Striker Product Family
Using advanced ALD technology, these products deliver dielectric films with exceptional control for critical processes in advanced devices with nanoscale features.
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VECTOR Product Family
Our PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.
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ALTUS Product Family
Combining CVD and ALD technologies, these market-leading systems deposit highly conformal metal films for advanced tungsten metallization applications.