射頻 MEMS Archives - Lam Research

Solution: 射頻 MEMS

Pulsus Product Family

脈衝雷射沉積(PLD)

Our Pulsus product family provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications.

Reliant 沉積產品

Reliant 系統 化學氣相沉積(CVD) 脈衝雷射沉積(PLD) 電漿輔助化學氣相沉積(PECVD) 高密度電漿化學氣相沉積(HDP-CVD)

我們的 Reliant 沉積產品可實現特殊製程藍圖,並延長晶圓廠的生產壽命。

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