Solution: RF MEMS
Pulsus Product Family
Pulsed Laser Deposition (PLD)
Our Pulsus product family provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications.
Reliant Deposition Products
Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Pulsed Laser Deposition (PLD) Reliant Systems
Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Advanced Memory, Advanced Packaging, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Optoelectronics & Photonics, Patterning, RF MEMS, Sensors & Transducers, Transistor