Providing Quality Parts for Quality Results

Lam provides a comprehensive portfolio of consumable and non-consumable spare parts designed to balance performance, availability, and cost of operation of Lam Research equipment.

As an original equipment manufacturer (OEM), we use learning from actual equipment data to maximize operational efficiency for our spare parts. Lam’s robust business processes, quality control systems, and strong worldwide supply chain ensure that customers have reliable equipment that delivers predictable and repeatable results.

Customers are supported by our global infrastructure with world-class inventory planning, ordering systems, and technical capabilities. Distribution centers are strategically positioned around the world to ensure prompt parts delivery.

A wide range of parts availability and management options are available. For specific information, please visit MyLam® or contact your local Lam Research representative.

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