射频 MEMS Archives - Lam Research

Solution: 射频 MEMS

Pulsus Product Family

脉冲激光沉积(PLD)

Our Pulsus product family provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications.

Reliant 沉积产品

Reliant 设备 化学气相沉积(CVD) 等离子体增强化学气相沉积(PECVD) 脉冲激光沉积(PLD) 高密度等离子体化学气相沉积(HDP-CVD)

我们的 Reliant 沉积产品可实现特色工艺路线图,并延长晶圆厂的生产设备利用年限。

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