Lam Research offers a wide range of product extension and productivity upgrades to maximize the return on semiconductor manufacturers’ equipment investments. These are designed to enhance productivity, reliability, and efficiency and to reduce overall costs.
Upgrades are offered for a range of Lam Research products, including plasma etch, thin film deposition, photoresist strip, and wafer cleaning systems. The following types of upgrades are available:
- Technology – extend the useful lifetime of the installed base by enabling existing equipment to process next-generation products
- Productivity – enhance system output of good product by increasing uptime and throughput and lowering operational costs
- Availability – increase overall system availability by improving reliability and extending preventative maintenance (PM) time
- Yield – increase output of good product by reducing defects, excursions, and scrapped wafers
- Green – support customer green initiatives/compliance by conserving energy and gas usage and reducing PFCs output
For additional information, please visit MyLam® or contact your local Lam Research representative.