Logic Archives - Lam Research
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Solution: Logic

Akara®

Conductor Etch

Designed for high-volume production with maximum process yield, Akara® increases wafer output and eliminates wasted time, with millisecond response times to any change. The industry’s most advanced etch uniformity controls provide angstrom-level critical dimension uniformity and wafer to wafer repeatability.

Dextro™

Automation Cleaning Maintenance

Dextro is a mobile unit with a robotic arm and uses various end-effectors as hands to manage critical equipment maintenance tasks that are time-consuming and prone to errors when done manually. Operated by a fab technician or engineer, Dextro executes complex maintenance tasks with precision and repeatability that are beyond human capability alone, enabling higher Read more…

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