Process: SEMSYSCO

Galaxy Product Family

Wet Clean/Strip/Etch

The Galaxy platform combines years of experience in batch wafer processing with advanced process control typically only found on single wafer tools.

Advanced Memory, Advanced Packaging, Analog & Mixed Signal, Discrete & Power Devices, Optoelectronics & Photonics, Sensors & Transducers

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Kallisto Product Family

Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch

An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.

Advanced Memory, Advanced Packaging, Advanced Substrates, Analog & Mixed Signal, Automotive, Discrete & Power Devices, Mini/Micro LED, Optoelectronics & Photonics, Panel Level Fanout

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Phoenix Product Family

Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Advanced Memory, Advanced Packaging, Advanced Substrates, Analog & Mixed Signal, Automotive, Discrete & Power Devices, Mini/Micro LED, Optoelectronics & Photonics, Panel Level Fanout

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Triton Product Family

Electrochemical Deposition (ECD) Wet Clean/Strip/Etch

The Triton platform is a versatile and modular solution for single wafer plating and wet processing.

Advanced Memory, Advanced Packaging, Analog & Mixed Signal, Automotive, Discrete & Power Devices, Mini/Micro LED, Optoelectronics & Photonics

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