Analog electronics are devices with a continuous variable signal, while digital electronics provide discrete signals and differentiate only two levels (such as “on” and “off”). As the name implies, mixed-signal devices contain both analog and digital circuits. Mixed-signal designs are cost-effective solutions commonly used to build consumer electronics applications, and this group of specialty devices has seen dramatic growth with the increased use of smartphones and other portable technologies. Processing equipment that provides high reliability and productivity cost-effectively is needed for the economical manufacture of analog and mixed-signal devices.
Analog & Mixed Signal
Our Solutions
DSiE Product Family
Deep Reactive Ion Etch (DRIE)
These products deliver exceptional process control at high productivity for several critical and non-critical deep silicon etch applications.
DV-Prime & Da Vinci Product Families
Wet Clean/Strip/Etch
These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.
Flex Product Family
Atomic Layer Etch (ALE) Reactive Ion Etch (RIE)
Our dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.
Galaxy Product Family
Wet Clean/Strip/Etch
The Galaxy platform combines years of experience in batch wafer processing with advanced process control typically only found on single wafer tools.
Kallisto Product Family
Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch
An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.
Kiyo Product Family
Reactive Ion Etch (RIE)
These market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.
Metior Product Family
Mass Metrology
Our mass metrology systems deliver sub-milligram measurement capability for advanced process monitoring and control of three-dimensional device structures.
OverViz
Plasma Modeling
OverViz™ is an industrial simulation software platform for high-fidelity modeling of plasma discharges.
Phoenix Product Family
Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch
Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.
Reliant Clean Products
Reliant Systems Wet Clean/Strip/Etch
Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Deposition Products
Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Pulsed Laser Deposition (PLD) Reliant Systems
Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Reliant Etch Products
Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE) Reliant Systems
Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs.
Sense.i Product Family
Atomic Layer Etch (ALE) Deep Reactive Ion Etch (DRIE)
Our latest etch platform offers unparalleled system intelligence in a compact, high-density architecture to deliver process performance at the highest productivity.
SP Series Product Family
Wet Clean/Strip/Etch
This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.
Triton Product Family
Electrochemical Deposition (ECD) Wet Clean/Strip/Etch
The Triton platform is a versatile and modular solution for single wafer plating and wet processing.
VECTOR Product Family
Plasma-Enhanced Chemical Vapor Deposition (PECVD)
Our PECVD product family provides precise dielectric film deposition at high productivity for a wide range of device applications.
Versys Metal Product Family
Reactive Ion Etch (RIE)
These metal etch products provide excellent process control at high-productivity for electrical connection and metal hardmask applications.