SEMSYSCO - Lam Research
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SEMSYSCO

Thank you for your interest in SEMSYSCO

SEMSYSCO is now a part of Lam Research. SEMSYSCO product line within Lam continues to offer a broad range of wet chemical processing solutions for wafer and panels.

Galaxy Product Family

Wet Clean/Strip/Etch

The Galaxy platform combines years of experience in batch wafer processing with advanced process control typically only found on single wafer tools.

Kallisto Product Family

Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch

An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.

Phoenix Product Family

Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Triton Product Family

Electrochemical Deposition (ECD) Wet Clean/Strip/Etch

The Triton platform is a versatile and modular solution for single wafer plating and wet processing.


Certificates

Certificate ISO 9001:2015

307BD Certification mark

Renew Certificate ISO 9001:2015 (English)

Renew Certificate ISO 9001:2015 (German)


Purchasing Conditions

TE 0095 Purchasing Conditions SEMSYSCO (English)

TE 0095 Purchasing Conditions SEMSYSCO (German)


SEMSYSCO Product Line Contact

EMEA

Andreas Wocko
Email: [email protected]
Phone: +49 172 8690270

US

Ross Kulzer
Email: [email protected]
Phone: +1 406 897 0728

APAC

Frank Su
Email: [email protected]
Phone: +886 3 5798 666

General Inquiries

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