SEMSYSCO - Lam Research
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SEMSYSCO

Thank you for your interest in SEMSYSCO

SEMSYSCO is now a part of Lam Research. SEMSYSCO product line within Lam continues to offer a broad range of wet chemical processing solutions for wafer and panels.

Kallisto Product Family

Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch

An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.

Phoenix Product Family

Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Triton Product Family

Electrochemical Deposition (ECD) Wet Clean/Strip/Etch

The Triton platform is a versatile and modular solution for single wafer plating and wet processing.


Certificates

Certificate ISO 9001:2015

Renew Certificate ISO 9001:2015 (English)

Renew Certificate ISO 9001:2015 (German)


Purchasing Conditions

TE 0095 Purchasing Conditions SEMSYSCO (English)

TE 0095 Purchasing Conditions SEMSYSCO (German)


SEMSYSCO Product Line Contact

EMEA

Andreas Wocko
Email: [email protected]
Phone: +49 172 8690270

US

Ross Kulzer
Email: [email protected]
Phone: +1 406 897 0728

APAC

Frank Su
Email: [email protected]
Phone: +886 3 5798 666

General Inquiries

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