Thank you for your interest in SEMSYSCO
SEMSYSCO is now a part of Lam Research. SEMSYSCO product line within Lam continues to offer a broad range of wet chemical processing solutions for wafer and panels.
Galaxy Product Family
Wet Clean/Strip/Etch
The Galaxy platform combines years of experience in batch wafer processing with advanced process control typically only found on single wafer tools.
Kallisto Product Family
Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch
An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.
Phoenix Product Family
Dielectric Developement Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch
Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.
Triton Product Family
Electrochemical Deposition (ECD) Wet Clean/Strip/Etch
The Triton platform is a versatile and modular solution for single wafer plating and wet processing.