SEMSYSCO - Lam Research


Thank you for your interest in SEMSYSCO

SEMSYSCO is now a part of Lam Research. SEMSYSCO product line within Lam continues to offer a broad range of wet chemical processing solutions for wafer and panels.

Kallisto Product Family

Electrochemical Deposition (ECD)

An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.

Phoenix Product Family

Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Triton Product Family

Electrochemical Deposition (ECD) Wet Clean/Strip

The Triton platform is a versatile and modular solution for single wafer plating and wet processing.


Certificate ISO 9001:2015

Renew Certificate ISO 9001:2015 (English)

Purchasing Conditions

TE 0095 Purchasing Conditions SEMSYSCO (English)

TE 0095 Purchasing Conditions SEMSYSCO (German)

SEMSYSCO Product Line Contact


Andreas Wocko
Email: [email protected]
Phone: +49 172 8690270


Ross Kulzer
Email: [email protected]
Phone: +1 406 897 0728


Frank Su
Email: [email protected]
Phone: +886 3 5798 666

General Inquiries