Technology: Atomic Layer Deposition (ALD)

ALTUS Product Family

Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD)

Combining CVD and ALD technologies, these market-leading systems deposit highly conformal metal films for advanced tungsten metallization applications.

Advanced Memory, Advanced Packaging, Interconnect, Transistor

Striker Product Family

Atomic Layer Deposition (ALD)

Using advanced ALD technology, these products deliver dielectric films with exceptional control for critical processes in advanced devices with nanoscale features.

Advanced Memory, Advanced Packaging, High Bandwidth Memory, Patterning, Transistor