Designed for high-volume production with maximum process yield, Akara® increases wafer output and eliminates wasted time, with millisecond response times to any change. The industry’s most advanced etch uniformity controls provide angstrom-level critical dimension uniformity and wafer to wafer repeatability.

Dextro is a mobile unit with a robotic arm and uses various end-effectors as hands to manage critical equipment maintenance tasks that are time-consuming and prone to errors when done manually. Operated by a fab technician or engineer, Dextro executes complex maintenance tasks with precision and repeatability that are beyond human capability alone, enabling higher Read more…

An advanced vertical processing platform for wet chemical treatment of substrates from 300x300mm up to Gen 5.1 (1100 x 1300mm) tailored to the needs of semi industry.

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Our semiconductor process modeling software, SEMulator3D®, performs predictive modeling of etch, deposition & other integrated processes, to identify problems prior to fabrication. VizGlow™ is a simulation platform for high-fidelity modeling of non-equilibrium plasma discharges.

The Triton platform is a versatile and modular solution for single wafer plating and wet processing.

Our semiconductor process modeling software (SEMulator3D) and plasma modeling software (OverViz) perform predictive modeling of etch, deposition, plasma & other processes, to identify problems prior to fabrication.

Our Prestis™ product provides thin film deposition solutions for a wide range of complex multi-element materials for Specialty Technologies applications.