Chemical Vapor Deposition (CVD) Archives - Lam Research
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Technology: Chemical Vapor Deposition (CVD)

ALTUS Product Family

Atomic Layer Deposition (ALD) Chemical Vapor Deposition (CVD)

Combining CVD and ALD technologies, these market-leading systems deposit highly conformal metal films for advanced tungsten metallization applications.

Reliant Deposition Products

Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Pulsed Laser Deposition (PLD) Reliant Systems

Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

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