Cryogenic Etching Archives - Lam Research

Technology: Cryogenic Etching

Flex Product Family

Atomic Layer Etch (ALE) Cryogenic Etching Reactive Ion Etch (RIE)

Our dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.

Vantex Product Family

Cryogenic Etching Reactive Ion Etch (RIE)

Designed for the Sense.i platform, Vantex redefines high aspect ratio etching with innovations in technology and Equipment Intelligence.