電晶體─亦即晶片的「大腦」─ 是控制電流流向的極小開關,在一顆晶片中可包含高達數十億個電晶體。隨著市場對更小,更強大電子產品的需求,推動了3D FinFET 等新型電晶體架構的發展,並使用高介電值(high-k)/金屬閘等特殊材料。這些新技術和新材料的發展使元件的特徵結構尺寸得以持續微縮。由於現今最新的電晶體尺寸已達到原子級,對製造而言是極大的挑戰。為確保這些先進元件的優異效能,製造功能需提供卓越的精密度與控制,才能形成所需的微小結構。
電晶體
解決方案Coventor Product Family
Plasma Modeling Semiconductor Process Modeling
Our semiconductor process modeling software (SEMulator3D) and plasma modeling software (OverViz) perform predictive modeling of etch, deposition, plasma & other processes, to identify problems prior to fabrication.
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