作为芯片的“大脑”，晶体管是一种用于控制电流的微小开关。在单一集成电路中可能有数十亿个晶体管。对更小、更强大的电子器件的需求正推动着新的晶体管结构的发展，如3D FinFET设计和高k值/金属栅极等特殊材料的使用。这些使得器件构件尺寸的不断缩小成为可能。对于目前原子层级的最新晶体管尺寸，它们的制造极具挑战性。为了确保这些先进器件实现预期的高性能，需要拥有卓越的制造能力，在形成微型构件时提供出色的精度和控制。
晶体管
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Plasma Modeling Semiconductor Process Modeling
Our semiconductor process modeling software (SEMulator3D) and plasma modeling software (OverViz) perform predictive modeling of etch, deposition, plasma & other processes, to identify problems prior to fabrication.
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