Technology: High-Density Plasma Chemical Vapor Deposition (HDP-CVD)

Reliant Deposition Products

Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Reliant Systems

The refurbished and newly built Reliant products offer reliable, production-proven solutions at low cost of ownership for dielectric film applications.

Advanced Memory, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Optoelectronics & Photonics, Packaging, Patterning, Sensors & Transducers, Transistor

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SPEED Product Family

High-Density Plasma Chemical Vapor Deposition (HDP-CVD)

These dielectric deposition products provide complete gapfill of high aspect ratio spaces with industry-leading throughput and reliability.

Advanced Memory, Discrete & Power Devices, Interconnect, Optoelectronics & Photonics, Sensors & Transducers, Transistor

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