Reliant Systems Archives - Lam Research
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Technology: Reliant Systems

Reliant Clean Products

Reliant Systems Wet Clean/Strip/Etch

Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

Reliant Deposition Products

Chemical Vapor Deposition (CVD) High-Density Plasma Chemical Vapor Deposition (HDP-CVD) Plasma-Enhanced Chemical Vapor Deposition (PECVD) Pulsed Laser Deposition (PLD) Reliant Systems

Our Reliant deposition products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

Reliant Etch Products

Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE) Reliant Systems

Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

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