Process: Strip & Clean

These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.

Our advanced wet clean products deliver exceptionally low on-wafer defectivity at high throughput for progressively demanding applications.

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.

The Triton platform is a versatile and modular solution for single wafer plating and wet processing.