Strip & Clean Archives - Lam Research
MyLam

Process: Strip & Clean

DV-Prime & Da Vinci Product Families

Wet Clean

These products provide the process flexibility needed with high productivity to address multiple wafer cleaning steps throughout manufacturing.

EOS Product Family

Wet Clean

Our advanced wet clean products deliver exceptionally low on-wafer defectivity at high throughput for progressively demanding applications.

Phoenix Product Family

Electrochemical Deposition (ECD) PR-Development PR-Strip Wet Clean/Strip/Etch

Phoenix offers a fully-automated high volume panel processing for 510x515mm substrates.

Reliant Clean Products

Reliant Systems Wet Clean/Strip/Etch

Our Reliant clean products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

SP Series Product Family

Wet Clean

This proven product family delivers reliable, cost-efficient wet clean/wet etch solutions that gently remove unwanted materials from the wafer.

Triton Product Family

Electrochemical Deposition (ECD) Wet Clean/Strip/Etch

The Triton platform is a versatile and modular solution for single wafer plating and wet processing.

circle-arrow2circle-arrow2facebookgooglehandshake2health2linkedinmenupdfplant2searchtwitteryoutube