Technology: Reactive Ion Etch (RIE)

Flex Product Family

Atomic Layer Etch (ALE) Reactive Ion Etch (RIE)

Our dielectric etch systems offer application-focused capabilities for creating a wide range of challenging structures in advanced devices.

Advanced Memory, Advanced Packaging, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Optoelectronics & Photonics, Patterning, Transistor

Kiyo Product Family

Reactive Ion Etch (RIE)

These market-leading conductor etch products deliver the high-performance precision and control at high productivity needed for critical device features.

Advanced Memory, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Patterning, Sensors & Transducers, Transistor

Reliant Etch Products

Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE) Reliant Systems

Our Reliant etch products enable roadmaps for Specialty Technologies and extend the productive life of fabs.

Advanced Memory, Advanced Packaging, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Optoelectronics & Photonics, Sensors & Transducers, Transistor

Syndion Product Family

Deep Reactive Ion Etch (DRIE) Reactive Ion Etch (RIE)

For deep etch applications, this product family provides the exceptional across-wafer uniformity control needed for critical high aspect ratio features.

Advanced Memory, Advanced Packaging, High Bandwidth Memory, Interconnect, Sensors & Transducers

Vantex Product Family

Reactive Ion Etch (RIE)

Designed for the Sense.i platform, Vantex redefines high aspect ratio etching with innovations in technology and Equipment Intelligence.

Advanced Memory

Versys Metal Product Family

Reactive Ion Etch (RIE)

These metal etch products provide excellent process control at high-productivity for electrical connection and metal hardmask applications.

Advanced Memory, Advanced Packaging, Analog & Mixed Signal, Discrete & Power Devices, Interconnect, Patterning